Semiconductor Metal Holder for High Density I/O Alignment

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Solution Overview

Problem

Current semiconductor devices face challenges in miniaturization and increasing the number of electrical connections (I/Os) while maintaining reliable connections, as existing techniques often compromise on either miniaturization or connection density.

Innovation Solution

A semiconductor device design featuring a substrate with bonding pads and metal holders or elements that are strategically positioned and configured to enhance electrical connections, including the use of insulation layers and metal holders with cavities to reduce pitch between bonding pads and improve alignment, thereby increasing I/O density without compromising robustness.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If the number of electrical connections (I/Os) is increased, then connection density is improved, but the distance between connections cannot be sufficiently reduced

Engineering Contradiction:
Improvenumber of electrical connectionsVSAvoiddistance between connections
Core Design Contradiction:
Quantity of substanceVSLength of moving object

Solution Approach 1:

The patent introduces a vertical dimension by stacking multiple substrates (first substrate, second substrate, third substrate) to form a three-dimensional structure. This allows electrical connections to be established in both horizontal and vertical directions, effectively increasing connection density without proportionally reducing the horizontal distance between connections. The metal holder extends vertically to connect bonding pads across multiple substrate layers.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent employs a nested structure where the metal holder is positioned within a cavity formed in the insulation layer, and multiple substrates are stacked within a compact package structure. This nesting approach allows multiple bonding pads and connections to be accommodated in a reduced horizontal footprint, effectively increasing connection density while maintaining manageable connection distances.

Inventive Principle:
Principle #7Nested doll (Nesting)

2Quantity of substance

If bonding pads are placed closer together to increase I/O density, then connection density is improved, but alignment precision becomes more difficult to maintain

Engineering Contradiction:
ImproveI/O densityVSAvoidalignment precision
Core Design Contradiction:
Quantity of substanceVSManufacturing precision

Solution Approach 1:

The patent introduces a metal holder as an intermediary component that provides mechanical support and positioning for bonding pads across multiple substrates. The holder's cavity structure acts as a precise template that guides the positioning of bonding pads, ensuring accurate alignment even when pads are placed closer together. This intermediary structure decouples the alignment requirement from the bonding pad spacing.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent performs preliminary positioning by first forming the cavity in the insulation layer and placing the metal holder within it before bonding the substrates. This preliminary action establishes a precise reference framework that guides subsequent bonding operations, ensuring that bonding pads are accurately aligned across multiple substrates even at reduced spacing.

Inventive Principle:
Principle #10Preliminary action

3Volume of moving object

If miniaturization is pursued to reduce device dimensions, then device size is reduced, but the robustness of electrical connections may be compromised

Engineering Contradiction:
Improvedevice dimensionsVSAvoidrobustness of electrical connections
Core Design Contradiction:
Volume of moving objectVSReliability

Solution Approach 1:

The patent applies local quality by providing enhanced mechanical support and protection specifically at the bonding pad locations where electrical connections are made. The metal holder's cavity structure and positioning features provide localized reinforcement at critical connection points, ensuring robust electrical connections are maintained even as the overall device dimensions are reduced through miniaturization.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution allows for a higher number of electrical connections with improved reliability and reduced risk of solder breakage and short circuits, while accommodating more bonding pads in a given area, thus enhancing miniaturization and connection density.

Implementation Method 1

bonding the two metal holder materials to the bonding pad

Methodology Applied
Scientific EffectThermal bonding: Soldering

Data Source

PatentUS11322468B2Semiconductor device including metal holder and method of manufacturing the same
Publication Date: 2022.05.03 ADVANCED SEMICON ENG INC
  • US11322468B2 patent drawing
  • US11322468B2 patent drawing
  • US11322468B2 patent drawing

AI summary

A semiconductor device and a method of manufacturing the same are provided. The semiconductor device includes a substrate and a metal holder. The substrate includes at least one bonding pad disposed adjacent to its surface and the metal holder is disposed adjacent to the bonding pad.