Semiconductor Device Metallic Interlayer Chipping Prevention

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Solution Overview

Problem

Conventional semiconductor devices are prone to chipping during transportation due to direct force application on the thin semiconductor element, which is unsupported by the resin at its edge.

Innovation Solution

A semiconductor device design featuring a thin semiconductor element with front-side and back-side electrodes, a metallic member with a thickness equal to or greater than the semiconductor element, and a resin member surrounding the metallic member to prevent direct load on the semiconductor element.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If the thin semiconductor element is directly supported by resin at its edge, then the structure is simple and easy to manufacture, but the semiconductor element is prone to chipping during transportation due to direct force application

Engineering Contradiction:
Improveease of manufactureVSAvoidreliability
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The patent introduces a metallic member as an intermediary between the resin and the thin semiconductor element. This metallic member has a thickness equal to or greater than the semiconductor element and is surrounded by the resin, which in turn contacts the lateral side of the metallic member. This intermediary structure prevents direct force application to the semiconductor element during handling and transportation, thereby preventing chipping while maintaining manufacturing simplicity.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Reliability

If the metallic member with thickness equal to or greater than the semiconductor element is introduced, then the semiconductor element is protected from chipping, but the device complexity increases

Engineering Contradiction:
ImprovereliabilityVSAvoiddevice complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The metallic member serves multiple functions simultaneously: it acts as a protective barrier against direct force application, provides structural support with its thickness equal to or greater than the semiconductor element, and enables the resin to surround and protect the periphery of the semiconductor element. This multi-functionality reduces the need for additional separate protective components, thereby limiting the increase in device complexity.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Reliability

If the resin surrounds the periphery of the metallic member with the metallic member thickness equal to or greater than the semiconductor element, then the semiconductor element is protected from direct load, but the manufacturing process becomes more complex

Engineering Contradiction:
ImprovereliabilityVSAvoidease of manufacture
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The metallic member is formed on the electrode surface before the resin is applied. This preliminary formation of the metallic member with thickness equal to or greater than the semiconductor element creates a pre-established protective structure. Subsequently, the resin is applied to surround the periphery of this metallic member, which simplifies the overall manufacturing process compared to attempting to create the protective structure after resin application.

Inventive Principle:
Principle #10Preliminary action

Data Source

PatentUS11264318B2Semiconductor device, method for manufacturing the same, and semiconductor module
Publication Date: 2022.03.01 MITSUBISHI ELECTRIC CORP
  • US11264318B2 patent drawing
  • US11264318B2 patent drawing
  • US11264318B2 patent drawing

AI summary

Provided is a semiconductor device free from chipping of a thin semiconductor element during transportation. The semiconductor device includes: a thin semiconductor element including a front-side electrode on the front side of the semiconductor element, and including a back-side electrode on the back side of the semiconductor element; a metallic member formed on at least one of the front-side electrode and the back-side electrode, the metallic member having a thickness equal to or greater than the thickness of the semiconductor element; and a resin member in contact with the lateral side of the metallic member and surrounding the periphery of the metallic member, with a part of the front side of the semiconductor element being exposed.