Semiconductor Package Vertical Stacking and Thermal Management

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Solution Overview

Problem

Current semiconductor packaging technologies face challenges in achieving miniaturization, higher speed, and reduced transmission loss, particularly in integrating semiconductor chips with efficient electrical connections and heat management, while maintaining design flexibility and memory capacity.

Innovation Solution

The method involves forming a semiconductor package with vertically stacked memory dies and logic dies, using through insulator vias (TIVs) and a redistribution structure for electrical connectivity, and incorporating a heat sink for thermal management, allowing for increased memory capacity without expanding horizontal footprint and providing greater design flexibility.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If semiconductor chips are bonded to a circuit carrier for electrical connections, then electrical connectivity is achieved, but transmission loss and insertion loss increase

Engineering Contradiction:
Improveelectrical connection reliabilityVSAvoidtransmission loss
Core Design Contradiction:
ReliabilityVSLoss of energy

Solution Approach 1:

The patent transitions from horizontal bonding of semiconductor chips to a circuit carrier to a vertical stacking architecture where memory dies and logic dies are stacked in the Z-dimension. Through-silicon vias (TSVs) provide vertical electrical interconnections, eliminating the need for horizontal trace routing on a circuit carrier. This dimensional change reduces transmission loss by shortening current paths and removing intermediate bonding interfaces.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Quantity of substance

If memory capacity is increased by adding more chips, then storage capacity improves, but horizontal footprint expands

Engineering Contradiction:
Improvememory capacityVSAvoidhorizontal footprint
Core Design Contradiction:
Quantity of substanceVSArea of stationary object

Solution Approach 1:

The patent stacks multiple memory dies vertically in the Z-dimension rather than placing them side-by-side in the X-Y plane. This vertical integration achieves high memory capacity (e.g., 128GB, 256GB) within a compact footprint by utilizing the third dimension. The stacked architecture maintains a small horizontal footprint while dramatically increasing storage capacity through multi-layer die stacking.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent implements a nested structure where multiple memory dies are stacked within a single package footprint, with each die containing memory arrays and shared control logic. The vertical stacking creates a nested arrangement where dies are positioned one above another, sharing common TSV interconnect structures and control units, thereby maximizing memory capacity within a confined horizontal area.

Inventive Principle:
Principle #7Nested doll (Nesting)

3Volume of moving object

If chip size is reduced for miniaturization, then device size decreases, but heat management becomes more difficult

Engineering Contradiction:
Improvedevice sizeVSAvoidheat management
Core Design Contradiction:
Volume of moving objectVSTemperature

Solution Approach 1:

The patent introduces an intermediary thermal management structure between the stacked dies and the external environment. A heat spreader or thermal interface material is positioned between the logic die and the heat sink, facilitating efficient heat transfer. The heat sink is attached to the bottom of the stacked assembly, providing a dedicated thermal pathway that conducts heat away from the compact vertical structure, thereby managing thermal density in miniaturized devices.

Inventive Principle:
Principle #24Intermediary (Mediator)

4Quantity of substance

If vertical stacking of dies is implemented, then memory capacity increases within constant footprint, but manufacturing complexity increases

Engineering Contradiction:
Improvememory capacityVSAvoidmanufacturing complexity
Core Design Contradiction:
Quantity of substanceVSDevice complexity

Solution Approach 1:

The patent employs preliminary action by pre-forming TSVs and bonding pads on memory dies before stacking. The TSVs are etched, lined, and filled with conductive material in advance, and bonding pads are prepared on the die surfaces prior to assembly. This preliminary preparation of interconnect structures simplifies the subsequent stacking process, as dies can be directly bonded using established flip-chip or wire bonding techniques without requiring complex in-situ interconnect formation.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enhances electrical performance by reducing transmission loss, supports miniaturization, and allows for increased memory capacity within a constant footprint, while enabling more flexible design and efficient heat management.

Implementation Method 1

incorporating a heat sink for thermal management

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 2

heat sink for thermal management

Methodology Applied
Scientific EffectConvection: Convection

Data Source

PatentUS11195817B2Semiconductor package and manufacturing method thereof
Publication Date: 2021.12.07 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US11195817B2 patent drawing
  • US11195817B2 patent drawing
  • US11195817B2 patent drawing

AI summary

A semiconductor package includes a redistribution structure, a memory wafer, semiconductor dies and conductive vias. The memory wafer, disposed over the redistribution structure, includes at least one memory die. The semiconductor dies are disposed side by side with respect to each other, between the memory wafer and the redistribution structure, and are electrically connected to the redistribution structure. The conductive vias electrically connect the at least one memory die with the redistribution structure. A semiconductor package includes a redistribution structure, a reconstructed wafer, and a heat sink. The reconstructed wafer is disposed on the redistribution structure. The reconstructed wafer includes logic dies and memory dies. The logic dies are electrically connected to the redistribution structure. The memory dies are electrically connected to the redistribution structure and vertically stacked with the logic dies. The heat sink is disposed on the reconstructed wafer. The heat sink is fastened to the reconstructed wafer.