Semiconductor Device Testing with Low-Storage RTN Detection

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Solution Overview

Problem

Existing noise detection techniques for semiconductor devices, particularly in memory arrays, are inefficient due to reliance on statistical histograms and complex algorithms, requiring large storage and computing resources, and fail to accurately detect infrequent Random Telegraph Noise (RTN) in semiconductor devices.

Innovation Solution

A noise detection system that uses less complex comparison approaches to analyze measurement results, dynamically updating boundary values and reducing storage requirements, allowing for rapid and accurate identification of RTN by comparing measurement results with predefined thresholds and generating a map of affected devices.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If statistical histograms and complex algorithms are used for noise detection, then measurement precision is improved, but device complexity increases and storage requirements increase

Engineering Contradiction:

Improvenoise detection accuracyVSAvoiddetection system complexity

Core Design Contradiction:

Measurement precisionVSDevice complexity

Solution Approach 1:

The patent extracts only the essential boundary values (maximum and minimum) from the measurement results, discarding the need for complete statistical histograms. This extraction approach maintains noise detection capability while significantly reducing computational complexity and storage requirements.

Inventive Principle:

Principle #2Taking out (Extraction)

Solution Approach 2:

The patent uses simple comparison operations instead of complex statistical algorithms. These simple computational objects are faster and require less resources, effectively replacing the expensive (computationally intensive) statistical analysis while achieving the same detection goal.

Inventive Principle:

Principle #27Cheap short-living objects (Disposable)

2Measurement precision

If statistical histograms are used for noise detection, then measurement precision is improved, but loss of time increases

Engineering Contradiction:

Improvenoise detection accuracyVSAvoidanalysis time

Core Design Contradiction:

Measurement precisionVSLoss of time

Solution Approach 1:

The patent pre-establishes boundary values (maximum and minimum thresholds) before performing noise detection. This preliminary setup allows for rapid comparison-based detection without requiring time-consuming statistical histogram calculations during the actual measurement process.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The patent replaces the mechanical process of computing statistical histograms with a simpler comparison-based system. This substitution uses basic threshold comparisons instead of complex statistical computations, dramatically reducing analysis time while maintaining detection precision.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

3Measurement precision

If statistical histograms are used for noise detection, then measurement precision is improved, but quantity of substance increases

Engineering Contradiction:

Improvenoise detection accuracyVSAvoidstorage requirements

Core Design Contradiction:

Measurement precisionVSQuantity of substance

Solution Approach 1:

The patent extracts only the critical boundary values (maximum and minimum thresholds) needed for noise detection, eliminating the need to store complete statistical histograms. This extraction reduces storage requirements from storing numerous histogram data points to storing just two boundary values per measurement parameter.

Inventive Principle:

Principle #2Taking out (Extraction)

4Measurement precision

If complex algorithms are used for noise detection, then measurement precision is improved, but productivity decreases

Engineering Contradiction:

Improvenoise detection accuracyVSAvoiddetection speed

Core Design Contradiction:

Measurement precisionVSProductivity

Solution Approach 1:

The patent substitutes complex statistical algorithms with simple comparison operations. This replacement uses basic threshold comparisons that can be executed rapidly, significantly improving detection speed and productivity while maintaining the ability to accurately identify Random Telegraph Noise events.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Data Source

PatentUS20250327849A1Systems and method to test semiconductor devices

Publication Date: 2025.10.23 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD

AI summary

A method for testing semiconductor devices is disclosed, which includes: obtaining a result measured on a semiconductor device in one of a set of tests; comparing the result with a maximum value determined among respective results that were previously measured in one or more of the set of tests and a minimum value determined among respective results that were previously measured in one or more of the set of tests; determining, based on the comparison between the first result and the maximum and minimum values, whether to update the maximum and minimum values to calculate a delta value; comparing the delta value with a noise threshold value; determining based on the comparison between the delta value and the noise threshold value, whether to update a value of a timer; determining that the value of the timer satisfies a timer threshold; and determining that the semiconductor device incurs noise.