Semiconductor Tester Harmonic Correction for Waveform Distortion
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Solution Overview
Problem
Existing semiconductor device measurement technologies face challenges in maintaining analysis precision due to distortion in time waveforms caused by non-uniform frequency characteristics of amplifiers during light probing.
Innovation Solution
A semiconductor device measurement apparatus that includes an operational signal generator, light source, detector, amplifier, and analysis system, which uses a correction value derived from harmonic signals to correct amplified signals, improving precision by addressing distortion and noise reduction.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If an amplifier is used to amplify the detection signal, then the signal strength is improved, but the time waveform becomes distorted due to non-uniform frequency characteristics
Solution Approach 1:
The system performs preliminary measurement of the amplifier's frequency characteristics before actual testing. A correction value is pre-calculated based on these characteristics and stored for later use during signal analysis, allowing the distorted amplified signal to be corrected without affecting real-time measurement speed.
Solution Approach 2:
The system measures the actual frequency characteristics of the amplifier and uses this information to generate a correction value that compensates for the amplifier's non-uniform frequency response. This feedback mechanism allows the system to adapt to the specific amplifier being used and correct its distortions accurately.
2Measurement precision
If correction processing is performed on the amplified signal, then analysis precision is improved, but additional processing time and complexity are required
Solution Approach 1:
The correction value is pre-calculated and stored before actual testing begins. During measurement, the system simply applies this pre-computed correction value to the amplified signal through straightforward multiplication in the frequency domain, avoiding complex real-time processing while maintaining high precision.
Solution Approach 2:
The system replaces complex time-domain deconvolution operations with simpler frequency-domain multiplication operations. By transforming the correction process to the frequency domain using FFT, the system achieves accurate correction with computationally efficient operations.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus enhances analysis precision by correcting amplified signals based on operational signals and reducing noise, particularly high and low frequency components, thereby improving fault location and failure analysis in semiconductor devices.
Implementation Method 1
a light source configured to generate light; an optics configured to illuminate the semiconductor device with the light; a detector configured to detect reflected light obtained by the semiconductor device reflecting the light
Data Source
AI summary
A semiconductor device measurement apparatus 1A includes a tester 2 that generates an operational pulse signal to be input to a semiconductor device 3, a light source 5 that generates light, a light branch optical system 6 that irradiates the semiconductor device with the light, a light detector 7 that detects reflected light obtained by the semiconductor device 3 reflecting the light, and outputs a detection signal, an analog signal amplifier 8 that amplifies the detection signal and outputs an amplified signal, and an analysis apparatus 10 that analyzes an operation of the semiconductor device 3 based on the amplified signal and a predetermined correction value, wherein the predetermined correction value is obtained based on a signal obtained by the analog signal amplifier 8 amplifying a signal corresponding to a harmonic of a fundamental frequency of the operational pulse signal.