Semiconductor Withstand Voltage Improvement Layer

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Solution Overview

Problem

Semiconductor devices face challenges in achieving high withstand voltages without affecting transistor characteristics, as lowering impurity concentration to expand the depletion layer can lead to decreased threshold voltage due to the short channel effect in miniaturized transistors.

Innovation Solution

A withstand voltage improvement layer with an impurity diffusion layer of the same conductivity type as the drain is introduced, isolated from the transistor circuit elements, which expands the depletion layer by applying a voltage within a specific range, thereby increasing the maximum withstand voltage without affecting transistor characteristics.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Strength

If impurity concentration is lowered to expand the depletion layer, then withstand voltage is improved, but threshold voltage decreases due to short channel effect

Engineering Contradiction:
Improvewithstand voltageVSAvoidthreshold voltage
Core Design Contradiction:
StrengthVSReliability

Solution Approach 1:

The invention divides the semiconductor device into functionally independent regions: the transistor active region and the withstand voltage improvement layer. By segmenting the depletion layer expansion function into a separate layer with its own impurity diffusion region, the patent allows the transistor region to maintain its original impurity concentration and threshold voltage characteristics, while the improvement layer independently provides enhanced withstand voltage through controlled depletion layer expansion.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The withstand voltage improvement layer acts as an intermediary structure between the transistor and the high voltage stress. This intermediate layer, with its specific impurity concentration and depletion layer characteristics, mediates the voltage stress, allowing the main transistor to operate at normal threshold voltages while the improvement layer handles the high voltage protection function.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Strength

If impurity concentration is lowered to expand the depletion layer, then maximum withstand voltage increases, but transistor characteristics are affected

Engineering Contradiction:
Improvemaximum withstand voltageVSAvoidtransistor characteristics
Core Design Contradiction:
StrengthVSEase of operation

Solution Approach 1:

The patent segments the voltage handling function from the transistor operation function by creating a separate withstand voltage improvement layer. This layer has optimized impurity concentration for maximum withstand voltage, while the transistor maintains its original characteristics. The segmentation allows independent optimization of each function without compromise.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The invention applies local quality by creating a region with specific impurity concentration characteristics tailored for withstand voltage improvement, distinct from the transistor region. The withstand voltage improvement layer has locally optimized impurity distribution that differs from the transistor active region, allowing each area to have the quality needed for its specific function.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively enhances the surface withstand voltage by up to 1.4 times, improving the transistor's resistance to voltage without increasing power consumption or impacting transistor performance.

Implementation Method 1

a depletion layer being expanded to reach the second semiconductor region or the third semiconductor region from the fourth semiconductor region by applying a voltage to the fourth semiconductor region

Methodology Applied
Scientific EffectDepletion layer expansion: Electric Field

Data Source

PatentUS10861930B2Semiconductor device
Publication Date: 2020.12.08 KIOXIA CORP
  • US10861930B2 patent drawing
  • US10861930B2 patent drawing
  • US10861930B2 patent drawing

AI summary

A semiconductor memory device includes an n-type source/drain formed in a surface region of a p-type active region, and a gate. The semiconductor memory device also includes a withstand voltage improvement layer provided with a preset distance maintained from at least one end of the source/drain. N-type impurities are diffused in the withstand voltage improvement layer, and a withstand voltage improvement voltage is applied to the withstand voltage improvement layer to expand a depletion layer to reach the source/drain, so that the maximum withstand voltage value of a transistor is increased.