Semipolar GaN Laser Diode Chip Size Reduction

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Solution Overview

Problem

Current laser technologies for blue and green wavelengths are inefficient, large, expensive, and fragile, with high sensitivity to temperature, limiting their broader deployment and application.

Innovation Solution

The use of semipolar gallium and nitrogen containing substrates, such as GaN, AlN, InN, InGaN, and AlGaN, in optical devices like laser diodes, which employ etched facets and p-down bonding to reduce chip size and cost, enabling efficient production and high-yield manufacturing.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Use of energy by moving object

If traditional laser technologies (Ar-ion gas lasers, LPSS-SHG, DPSS-SHG) are used for blue and green wavelengths, then laser output can be achieved, but wall plug efficiency remains low (1-10%), device size is large, cost is high, and temperature sensitivity is high

Engineering Contradiction:
Improvewall plug efficiencyVSAvoiddevice size and structure
Core Design Contradiction:
Use of energy by moving objectVSDevice complexity

Solution Approach 1:

The patent extracts and eliminates the intermediate frequency conversion crystal stage from the traditional three-stage laser system. By using direct bandgap semiconductor materials (InGaN, AlGaN) that can directly emit blue/green light, the system removes the 1064nm laser crystal and SHG crystal, achieving wall plug efficiency >50% while reducing device size and complexity

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent changes the fundamental material parameter from indirect bandgap (traditional laser crystals) to direct bandgap semiconductor materials. This parameter change enables direct light emission at blue/green wavelengths without frequency conversion, dramatically improving efficiency from 1-10% to >50% and simplifying the device structure

Inventive Principle:
Principle #35Parameter changes

2Use of energy by moving object

If lamp pumped solid state lasers are used, then red and infrared wavelengths can be achieved with improved efficiency, but blue and green wavelengths remain challenging and require complex frequency conversion systems

Engineering Contradiction:
ImproveefficiencyVSAvoidmanufacturing complexity
Core Design Contradiction:
Use of energy by moving objectVSEase of manufacture

Solution Approach 1:

The patent extracts the frequency conversion crystal and intermediate laser stage from the system. By using direct bandgap semiconductor materials that naturally emit blue/green light, the complex three-stage system (lamp→1064nm crystal→SHG crystal→visible) is reduced to a single efficient stage (electricity→semiconductor→visible), achieving >50% efficiency and simplifying manufacturing

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent uses composite semiconductor material structures (InGaN quantum wells embedded in AlGaN barriers) to achieve direct blue/green light emission. This composite material approach enables high efficiency (>50%) and simplified manufacturing by eliminating the need for separate frequency conversion components

Inventive Principle:
Principle #40Composite materials

3Use of energy by moving object

If diode pumped solid state lasers with SHG are used, then wall plug efficiency improves to 5-10%, but system cost increases, temperature control requirements increase, and device size remains substantial

Engineering Contradiction:
Improvewall plug efficiencyVSAvoidtemperature sensitivity
Core Design Contradiction:
Use of energy by moving objectVSObject-affected harmful factors

Solution Approach 1:

The patent removes the temperature-sensitive frequency conversion crystal and intermediate laser stage. By using direct bandgap semiconductor materials that emit blue/green light directly, the system achieves >50% efficiency without the temperature control complexities inherent in DPSS-SHG systems

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent changes from indirect bandgap materials (requiring frequency conversion and temperature control) to direct bandgap semiconductor materials. This parameter change enables direct blue/green emission with >50% efficiency and reduced temperature sensitivity

Inventive Principle:
Principle #35Parameter changes

4Device complexity

If directly doubled diode lasers are used, then efficiency and modularity improve, but severe temperature sensitivity limits application

Engineering Contradiction:
Improvedevice size and modularityVSAvoidtemperature sensitivity
Core Design Contradiction:
Device complexityVSObject-affected harmful factors

Solution Approach 1:

The patent uses composite semiconductor structures (InGaN quantum wells in AlGaN barriers) with optimized composition ratios. This material composition approach achieves direct blue/green emission with improved thermal stability and >50% efficiency, reducing the severe temperature sensitivity of earlier diode designs

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach results in cost-effective, efficient, and compact optical devices capable of emitting electromagnetic radiation in the desired wavelengths, with improved modularity and reduced sensitivity to temperature, facilitating broader applications.

Implementation Method 1

a gallium and nitrogen containing optical device operable as a laser diode

Methodology Applied
Scientific EffectLaser emission: Laser

Implementation Method 2

a chip formed from the gallium and nitrogen substrate member

Methodology Applied
Scientific EffectLight emission from semiconductor: Light Emitting Diode

Data Source

PatentUS11664643B1Narrow sized laser diode
Publication Date: 2023.05.30 KYOCERA SLD LASER INC
  • US11664643B1 patent drawing
  • US11664643B1 patent drawing
  • US11664643B1 patent drawing

AI summary

Gallium and nitrogen containing optical devices operable as laser diodes and methods of forming the same are disclosed. The devices include a gallium and nitrogen containing substrate member, which may be semipolar or non-polar. The devices include a chip formed from the gallium and nitrogen substrate member. The chip has a width and a length, a dimension of less than 150 microns characterizing the width of the chip. The devices have a cavity oriented substantially parallel to the length of the chip.