Sensor-Based Auto-Calibration Wafer for Semiconductor Robots
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Solution Overview
Problem
In semiconductor processing systems, manual robot calibration exposes operators to potential injury and results in lost production time due to system shutdowns, as it requires manual observation and handling, leading to inefficiencies and safety concerns.
Innovation Solution
A calibration device with a sensor-covered surface, battery, and data storage or transmitter that can be placed on a substrate support by a robot, allowing for contact or proximity data collection, calculation of center point locations, and determination of offsets to calibrate the robot without manual intervention, enabling precise positioning within the system while maintaining safety and reducing downtime.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If manual calibration is performed with operator observation, then calibration accuracy can be visually confirmed, but operator safety is compromised and production time is lost
Solution Approach 1:
A calibration device with sensor-covered surface acts as an intermediary between the robot end effector and the calibration target. The sensor detects contact or proximity automatically, eliminating the need for manual observation while maintaining calibration accuracy. The device includes a body with first and second surfaces, a sensor on the second surface that covers it, a battery on the first surface, and data storage or transmitter on the first surface.
Solution Approach 2:
The patent replaces manual mechanical observation with automated sensor detection. The sensor electronically detects when the robot end effector contacts or approaches the calibration device, substituting the mechanical/visual calibration process with an automated electronic detection system that eliminates operator exposure to robot motion.
2Object-affected harmful factors
If system is shut down for manual calibration, then operator safety is protected, but production time is lost
Solution Approach 1:
The calibration device performs self-calibration by automatically detecting contact or proximity through its sensor. The device autonomously determines when calibration is complete without requiring operator intervention or system shutdown, allowing the robot to remain operational and eliminating production time loss while maintaining safety.
Solution Approach 2:
The calibration device is pre-equipped with sensor, battery, and data storage/transmitter components before calibration begins. This preliminary preparation allows immediate automated calibration upon robot contact, eliminating the need for system shutdown and decontamination procedures that would otherwise be required.
3Productivity
If automated sensor-based calibration is used, then productivity is improved and safety is maintained, but device complexity increases
Solution Approach 1:
The calibration device is segmented into distinct functional components: a body structure, a sensor system on the second surface, a battery on the first surface, and data storage/transmitter on the first surface. This segmentation allows each component to perform its specific function independently, simplifying the overall design while enabling automated calibration operations.
Data Source
AI summary
Embodiments described herein generally relate to an apparatus and method of performing a robot calibration process within a substrate processing system. In one embodiment, a calibration device is used to calibrate a robot having an end effector. The calibration device includes a body, a first side and a second side opposite to the first side. The calibration device further includes a sensor disposed on the second side of the body. In some embodiments, the sensor covers the entire second side of the body. In this configuration, because the sensor covers the entire second side of the body of the calibration device, the calibration device can be utilized to sense the contact between the sensor and various differently configured chamber components found in different types of processing chambers or stations disposed within a processing system during a calibration process performed in each of the different processing chambers or stations.