Acceleration Sensor Electrode Adjustment
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Solution Overview
Problem
Existing acceleration sensors require additional structures and terminal pads for adjustment, which increases costs and wafer space, and are not easily adaptable for self-testing without real acceleration forces.
Innovation Solution
The method utilizes existing electrodes in a two-axis or multi-axis acceleration sensor to generate deflections through electrostatic interaction, compensating with voltage to adjust the seismic mass, eliminating the need for additional structures and allowing for in-situ adjustment during operation or manufacturing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If additional structures and terminal pads are added for adjustment, then the acceleration sensor can be adjusted, but wafer space and costs increase
Solution Approach 1:
The patent applies multi-functionality by enabling the existing electrodes (first and further first electrodes) to serve dual purposes: their primary function for detecting acceleration in the first direction and an additional function for generating deflection during adjustment. This eliminates the need for separate adjustment structures, thereby saving wafer space while maintaining adjustment capability.
Solution Approach 2:
The acceleration sensor performs self-adjustment using its own existing electrodes without requiring external additional structures. The first and further first electrodes generate the necessary electrostatic force for deflection when connected to an essentially equal potential, allowing the sensor to adjust itself during operation or manufacturing without additional hardware.
2Ease of operation
If additional structures are added for adjustment, then the acceleration sensor can be adjusted, but manufacturing costs increase
Solution Approach 1:
By making the existing electrodes multi-functional, the patent eliminates the need for additional adjustment structures, thereby reducing manufacturing steps, material costs, and assembly complexity while maintaining full adjustment functionality.
Solution Approach 2:
The sensor uses its own built-in electrodes for adjustment purposes, eliminating the need for external adjustment mechanisms. This self-service approach reduces manufacturing complexity and cost while enabling adjustment during operation or manufacturing.
3Reliability
If real acceleration force is applied for testing, then the acceleration sensor can be tested, but the sensor cannot be adjusted without additional structures
Solution Approach 1:
The acceleration sensor performs self-testing by using its own existing electrodes (first and further first electrodes) to generate the necessary deflection force. This eliminates the need for external testing equipment or additional adjustment structures, allowing reliable testing and adjustment during operation or manufacturing.
Solution Approach 2:
The patent replaces the need for mechanical acceleration forces with an electrostatic field-based system. The first and further first electrodes generate electrostatic force to produce deflection, substituting mechanical testing with an electrical field approach, thereby eliminating the need for additional mechanical adjustment structures.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach simplifies and economizes the adjustment process, saving wafer space and costs, while enabling effective self-testing and calibration of acceleration sensors for both in-plane and out-of-plane orientations without additional hardware.
Implementation Method 1
The first and further first electrodes, between which the counter-electrodes of the seismic mass are situated, are part of a first differential capacitance system which is provided for differential evaluation of an acceleration of the seismic mass relative to the substrate perpendicular to the first direction in the operating mode of the acceleration sensor. To produce the first deflection, the first and further first electrodes are together connected to an essentially equal potential. As a result, the counter-electrodes undergo a deflection force along the first direction, due to electrostatic interaction with the first and the further first electrodes.
Implementation Method 2
This movement is compensated by the first compensation voltage, which is applied to the further second and further fourth electrodes.
Data Source
AI summary
A method for adjusting an acceleration sensor which includes a substrate and a seismic mass, the acceleration sensor having first and further first electrodes attached to the substrate on a first side, counter-electrodes of the seismic mass being situated between the first and further first electrodes, the acceleration sensor having further second electrodes on a second side and further fourth electrodes on a fourth side opposite the second side, an essentially equal first excitation voltage being applied to the first and further first electrodes in a first step for exciting a first deflection of the seismic mass along a first direction, the first deflection being compensated in a second step by applying a first compensation voltage to the further second and further fourth electrodes.