Physical Quantity Sensor Electrode Layout to Reduce Dead Space
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Solution Overview
Problem
Existing physical quantity sensors face challenges in reducing size and improving accuracy due to dead spaces and substrate warping, which affect sensitivity and detection accuracy.
Innovation Solution
A physical quantity sensor design with a first and second movable electrode section disposed side by side in a first direction, utilizing a one-side seesaw structure with support beams and coupling sections to minimize substrate influence and optimize space utilization, enhancing sensitivity and accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of moving object
If sensor elements are disposed in parallel in Y-axis direction, then the sensor can detect physical quantities, but dead space is formed and the sensor size cannot be reduced
Solution Approach 1:
The patent transitions from parallel arrangement in Y-axis direction to side-by-side arrangement in X-axis direction, utilizing the other dimension (X-axis) for sensor element placement. This dimensional change eliminates dead space formation while maintaining detection functionality, thereby reducing sensor size without compromising detection accuracy.
Solution Approach 2:
The patent employs asymmetric positioning where fixed sections are arranged alternately with movable electrode sections in the X-axis direction, creating an interdigitated pattern. This asymmetric layout optimizes space utilization by eliminating dead spaces that occur in symmetric parallel arrangements, enabling compact sensor design.
2Measurement precision
If fixed sections of sensor elements are disposed separately, then the sensor structure is simplified, but the sensor elements are easily affected by substrate warp
Solution Approach 1:
The patent merges multiple fixed sections into a single integrated fixed section structure that supports multiple sensor elements. This consolidation reduces the number of separate fixed sections, simplifying the overall structure while maintaining close proximity of all fixed sections to minimize substrate warp effects on detection accuracy.
Solution Approach 2:
The integrated fixed section serves multiple functions: it provides structural support for multiple sensor elements, acts as a common reference for all movable electrodes, and minimizes substrate warp effects for all sensing elements simultaneously. This multi-functionality reduces structural complexity while enhancing measurement precision.
3Volume of moving object
If sensor elements are disposed close together, then the sensor size is reduced, but dead space is formed affecting sensitivity
Solution Approach 1:
The patent arranges sensor elements side-by-side in the X-axis direction rather than stacking them in the Y-axis direction. This dimensional rearrangement allows elements to be disposed close together for compact size while eliminating dead space formation, thereby maintaining high sensitivity and detection reliability.
Solution Approach 2:
The patent changes the spatial arrangement parameter from parallel Y-axis alignment to side-by-side X-axis alignment. This parameter change optimizes the balance between compactness and sensitivity by eliminating dead spaces that form in parallel arrangements, ensuring reliable detection performance in a compact footprint.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design achieves a compact size and improved detection sensitivity by minimizing substrate warping effects and optimizing electrode placement, allowing for accurate detection of physical quantities.
Implementation Method 1
a movable electrode and a fixed electrode that face each other... a physical quantity sensor in which a plurality of sensor elements that respectively include fixed electrodes and movable electrodes and detect physical quantities are disposed
Data Source
AI summary
A physical quantity sensor includes first and second fixed electrode sections on a substrate, a first movable electrode section having a movable electrode opposite a fixed electrode of the first fixed electrode section, a second movable electrode section having a movable electrode opposite a fixed electrode of the second fixed electrode section, first and second fixed sections fixed to the substrate, a first support beam having one end coupled to the first fixed section, a first coupling section coupling the other end of the first support beam and the first movable electrode section, a second support beam having one end coupled to the second fixed section, and a second coupling section coupling the other end of the second support beam and the second movable electrode section. The first movable electrode section, the second fixed section, the first fixed section, and the second movable electrode section are disposed side by side.