Separated Pass Transistor Layout for 3D NAND Selection Line Timing

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Solution Overview

Problem

As memory cell sizes decrease for higher integration in memory devices, the complexity of operation circuits and wiring structures increases, leading to larger chip sizes and non-uniform setup speeds of selection lines, which can cause timing margins to decrease and degrade data reliability in 3D NAND flash memory.

Innovation Solution

The formation of some pass transistors on a P-type semiconductor substrate, with some in a pocket P-type well area and others on a separate P-type substrate, allows for improved signal setup speeds of selection lines and reduces chip size by utilizing double-driven pass transistors to enhance operational efficiency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If the number of pass transistors connected to word lines increases to achieve larger memory capacities in 3D NAND flash memory, then storage capacity is improved, but chip size increases

Engineering Contradiction:
Improvestorage capacityVSAvoidchip size
Core Design Contradiction:
Quantity of substanceVSArea of stationary object

Solution Approach 1:

The pass transistor circuit is divided into two separate circuits: a first pass transistor circuit disposed in a pocket P-type well area on the first P-type substrate, and a second pass transistor circuit disposed on a second P-type substrate. This segmentation allows the pass transistors to be distributed across different substrate areas, reducing the chip size required for a given storage capacity by utilizing both the main substrate and a separate substrate for the pass transistor circuits.

Inventive Principle:
Principle #1Segmentation

2Quantity of substance

If memory cell sizes decrease to provide higher integration, then integration density is improved, but complexity of operation circuits and wiring structures increases

Engineering Contradiction:
Improveintegration densityVSAvoidcomplexity of operation circuits and wiring structures
Core Design Contradiction:
Quantity of substanceVSDevice complexity

Solution Approach 1:

By segmenting the pass transistor circuit into two separate circuits on different substrates, the wiring complexity is reduced as each circuit can be optimized independently. The first circuit handles specific word line driving functions while the second circuit handles other gate line driving functions, simplifying the overall wiring structure compared to a single integrated circuit.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The invention moves from a two-dimensional planar integration approach to a three-dimensional stacked approach by placing pass transistor circuits on both the first substrate and a separate second substrate. This vertical stacking in the third dimension increases integration density without proportionally increasing the planar chip area or wiring complexity.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Quantity of substance

If the number of pass transistors increases to support more word lines, then memory capacity is improved, but setup speeds of selection lines become non-uniform, degrading data reliability

Engineering Contradiction:
Improvememory capacityVSAvoiddata reliability
Core Design Contradiction:
Quantity of substanceVSReliability

Solution Approach 1:

Dividing the pass transistor circuit into two separate circuits allows for independent optimization of signal driving capabilities. Each circuit can be designed to provide uniform setup speeds for its specific set of gate lines, preventing the non-uniform timing issues that arise when all pass transistors are concentrated in a single circuit. This segmentation ensures that selection lines maintain consistent setup speeds even as memory capacity increases through additional word lines.

Inventive Principle:
Principle #1Segmentation

Data Source

PatentUS20260013139A1Memory device having separated pass transistors
Publication Date: 2026.01.08 SAMSUNG ELECTRONICS CO LTD
  • US20260013139A1 patent drawing
  • US20260013139A1 patent drawing
  • US20260013139A1 patent drawing

AI summary

A memory device includes a memory block including a plurality of cell strings coupled between a first P-type substrate and a plurality of memory blocks, a first pass transistor circuit including a plurality of first pass transistors configured to drive first gate lines from among the plurality of gate lines, and a second pass transistor circuit including a plurality of second pass transistors configured to drive second gate lines from among the plurality of gate lines. The plurality of cell strings are coupled with the plurality of gate lines including a string selection line, a plurality of word lines, and a ground selection line. The plurality of gate lines are stacked in a vertical direction. The first pass transistor circuit is disposed in a pocket P-type well area formed on the first P-type substrate. The second pass transistor circuit is disposed on a second P-type substrate.