Series Capacitor Electrode Layout for Stable High-Frequency Capacitance
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional semiconductor devices face significant challenges in maintaining precise capacitance values due to variations in inductor and capacitor components, particularly at high frequencies, leading to critical deviations in resonant frequencies that affect filter characteristics.
Innovation Solution
A semiconductor device is designed with multiple capacitor elements electrically coupled in series, where each pair of capacitor elements is connected through a common electrode, and outer electrodes serve as terminal electrodes, reducing capacitance deviation by averaging the capacitance across multiple elements.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional single capacitor elements are used in high frequency circuits, then the device structure remains simple, but capacitance deviation becomes large leading to critical variations in resonant frequency
Solution Approach 1:
The capacitor is divided into multiple capacitor elements (first, second, third capacitor elements) with different capacitance values. These segmented elements are connected in series to form the total capacitance, where each element contributes differently to the overall capacitance value. This segmentation allows the total capacitance to be less sensitive to manufacturing variations in individual elements, thereby reducing capacitance deviation while maintaining a manageable structure.
2Reliability
If components with tighter deviations are selected to reduce resonant frequency variation, then frequency stability improves, but component availability and ease of manufacture decrease
Solution Approach 1:
The invention changes the parameter configuration by using capacitor elements with different capacitance values (C1, C2, C3) rather than identical values. By optimizing the distribution of capacitance values across multiple elements, the system achieves better frequency stability without requiring each individual component to have extremely tight tolerances. This approach provides more flexibility in component selection and manufacturing.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The configuration achieves a semiconductor device with reduced capacitance deviation and allows for precise capacitance control, enabling stable operation even at high frequencies.
Implementation Method 1
N first electrodes, a first dielectric film, and M second electrodes form M capacitor elements that are electrically coupled in series
Data Source
AI summary
A semiconductor device is provided that includes a substrate; N first electrodes over the substrate; a first dielectric film on the N first electrodes; M second electrodes over the N first electrodes with the first dielectric film interposed therebetween; a first protective layer covering the N first electrodes and the M second electrodes; three or more outer electrodes that extend through the first protective layer; and a second protective layer that covers each outer electrode of the three or more outer electrodes, other than two outer electrodes. At least one of the second electrodes is located over each first electrode, and the N first electrodes, the first dielectric film, and the M second electrodes form M capacitor elements that are electrically coupled in series.