Transparent Ring Gauge for Shadow Ring Alignment Verification
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Solution Overview
Problem
During semiconductor manufacturing, misalignment between a shadow ring and a substrate can lead to non-uniform deposition, reducing production yield due to incomplete shielding of the substrate's outer edge.
Innovation Solution
A transparent ring with gauge marks and pins is used to verify the alignment between the shadow ring and substrate, allowing for calibration of the substrate transfer robot to improve concentricity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a shadow ring is placed over a substrate to shield the outer edge from deposition, then the substrate outer edge is protected from deposition, but if the shadow ring is placed off-center, non-uniform shielding occurs reducing production yield
Solution Approach 1:
The patent applies preliminary action by performing alignment verification and calibration before the actual deposition process. A transparent ring tool with gauge marks is used to check the concentricity between the shadow ring and substrate, and to calibrate the substrate transfer robot positioning, ensuring proper alignment is established in advance to prevent non-uniform shielding during deposition
Solution Approach 2:
The patent replaces complex mechanical alignment systems with a simple optical inspection method. Instead of using sophisticated mechanical positioning systems or sensors to ensure shadow ring alignment, the invention uses a transparent ring with gauge marks that allows visual verification of concentricity, simplifying the alignment process while maintaining accuracy
2Manufacturing precision
If alignment verification tools and calibration procedures are implemented to improve concentricity, then substrate processing uniformity is enhanced, but device complexity and calibration time increase
Solution Approach 1:
The patent employs a simple, inexpensive transparent ring tool with gauge marks that can be easily manufactured and replaced if needed. This disposable-like approach to alignment verification avoids the need for expensive, complex, and maintenance-intensive alignment systems, achieving high concentricity verification capability with minimal device complexity
Solution Approach 2:
The transparent ring serves as an intermediary tool that facilitates alignment verification without being part of the permanent equipment infrastructure. This mediator tool bridges the gap between the shadow ring and substrate, enabling simple visual inspection of concentricity through its transparent nature and gauge marks, thereby avoiding direct complexity in the processing system
Data Source
AI summary
Methods and apparatus for verifying alignment between an opaque shadow ring and a substrate are provided. In some embodiments, the apparatus includes a tool comprising: a transparent ring having an inner edge defining a central opening and an outer edge and having a top side and a bottom side; a gauge mark on or in the transparent ring spaced between the inner edge and the outer edge, the gauge mark extending around the inner edge; and a pin extending from the bottom side of the transparent ring and located between the gauge mark and the outer edge.