Shape-Memory Alloy Robot Arm for Substrate Handling
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Solution Overview
Problem
Existing substrate attaching/detaching robots may cause damage to substrates and supporting members due to excessive force or accidental contact during the attachment or detachment process, leading to breakage of various parts in film formation apparatuses.
Innovation Solution
A substrate attaching/detaching robot equipped with a substrate holding member and a robot arm connected by at least three line-shaped members made of shape-memory alloy, which are set to a temperature within the alloy's shape recovery range, allowing for controlled and impact-absorbing handling of substrates during attachment and detachment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a substrate attaching/detaching robot uses a rigid connection between the substrate holding member and robot arm, then the positioning precision and control accuracy are improved, but the risk of substrate damage and part breakage due to excessive force or accidental contact increases
Solution Approach 1:
The patent changes the physical state and mechanical properties of the connection between the substrate holding member and robot arm by using shape-memory alloy line-shaped members instead of rigid connections. These members can change their stiffness and flexibility based on temperature and stress conditions, allowing them to be rigid during normal operation for precise positioning but flexible during accidental contact to absorb impact forces and prevent substrate damage.
Solution Approach 2:
The shape-memory alloy line-shaped members are designed to function as pre-configured cushioning elements that can absorb impact energy during accidental contact between the substrate holding member and substrate or substrate holder. This beforehand cushioning mechanism prevents excessive force transmission that would otherwise cause substrate damage or part breakage.
2Stability of the object's composition
If the substrate holding member is made rigid to maintain stable holding, then the holding stability is improved, but the impact from accidental contact causes breakage of various parts
Solution Approach 1:
The patent applies dynamics by using shape-memory alloy line-shaped members that can dynamically change their mechanical properties between rigid and flexible states. During normal holding operations, the members maintain rigidity for stable positioning. During accidental contact, they transition to a flexible state to absorb impact forces, preventing breakage of the substrate holding member, substrate, or substrate holder while maintaining holding stability through the robot arm's control system.
3Productivity
If the robot arm moves the substrate holding member with high speed and precision, then the productivity is improved, but the risk of excessive force application and substrate damage increases
Solution Approach 1:
The shape-memory alloy line-shaped members serve as pre-configured impact absorption mechanisms that protect against excessive force during high-speed substrate handling. When accidental contact occurs during rapid movements, these members deform to absorb the impact energy, preventing substrate damage while allowing the robot to maintain high operational speeds for improved productivity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The use of shape-memory alloy line-shaped members prevents breakage of substrates and supporting members by absorbing impacts and ensuring the substrate holding member returns to its original position, thereby inhibiting damage and maintaining control during the attachment and detachment process.
Implementation Method 1
The three line-shaped members are made of a shape-memory alloy. A temperature of the substrate holding member during attaching or detaching of the substrate onto or from a substrate holder configured to hold the substrate in a detachably attachable manner is in a range of a shape recovery temperature of the shape-memory alloy.
Data Source
AI summary
Breakage of various parts during attaching or detaching of a substrate is inhibited. A substrate attaching/detaching robot includes a substrate holding member configured to hold a substrate, a robot arm configured to move the substrate holding member, and at least three line-shaped members connecting the substrate holding member and an end of the robot arm. The three line-shaped members are made of a shape-memory alloy. A temperature of the substrate holding member during attaching or detaching of the substrate onto or from a substrate holder configured to hold the substrate in a detachably attachable manner is in a range of a shape recovery temperature of the shape-memory alloy.