Shared Optical Detection for Substrate Processing Fluid Paths
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Solution Overview
Problem
Existing substrate processing apparatuses with multiple supply paths face challenges in detecting foreign matter without increasing size and manufacturing cost, as existing optical detection mechanisms require a large size and higher costs due to the need for separate optical systems for each path.
Innovation Solution
A substrate processing apparatus with shared light irradiating and receiving units that form an optical path within measurement flow passage portions, allowing for detection of foreign matter across multiple supply paths without the need for individual optical systems, using a moving mechanism to position the light path within each flow passage portion.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If an optical detection mechanism is provided for each supply path to detect foreign matter, then detection accuracy is improved, but the apparatus size and manufacturing cost increase
Solution Approach 1:
The patent combines multiple optical detection mechanisms into a single integrated detection unit that can detect foreign matter across multiple supply paths simultaneously. The light source and detector are shared among multiple flow passage portions, eliminating the need for separate optical systems for each supply path while maintaining detection capability.
Solution Approach 2:
The optical detection unit is designed to serve multiple supply paths with a single configuration. The same light source and detector can monitor different chemicals flowing through different flow passage portions by switching the optical path or using multiple flow passages that share the detection mechanism, making the system universal across multiple supply paths.
2Reliability
If separate optical systems are provided for each supply path, then detection reliability is improved, but the apparatus becomes larger and more expensive
Solution Approach 1:
Multiple detection functions are merged into a single optical system. The patent uses a shared light source and detector that can monitor multiple supply paths, reducing the total apparatus area while maintaining reliable detection through proper optical path design and flow passage configuration.
Solution Approach 2:
The patent arranges multiple flow passage portions in a spatial configuration that allows a single optical system to monitor all paths. By stacking or arranging flow passages in three-dimensional space rather than requiring separate horizontal spaces for each detection system, the apparatus footprint is reduced while maintaining comprehensive monitoring coverage.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables effective detection of foreign matter in multiple supply paths while preventing an increase in apparatus size and manufacturing cost, ensuring high accuracy and reliability in substrate processing.
Implementation Method 1
a light irradiating unit configured to form an optical path in one of the flow passage portions
Data Source
AI summary
An apparatus includes: measurement flow passage portions as part of a respective plurality of supply paths of fluids to be supplied to a substrate, the measurement flow passage portions constituting measurement regions for measurement of foreign matter in the fluids, and being disposed so as to form a row with each other; a light irradiating unit configured to form an optical path in one of the flow passage portions, the light irradiating unit being shared by the plurality of flow passage portions; a moving mechanism configured to move the light irradiating unit relatively along a direction of arrangement of the flow passage portions to form the optical path within the flow passage portion selected among the plurality of flow passage portions; a light receiving unit including a light receiving element, the light receiving element receiving light transmitted by the flow passage portion; and a detecting unit configured to detect foreign matter in the fluid on a basis of a signal output from the light receiving element. Consequently, the number of necessary light irradiating units can be reduced, and the apparatus can be miniaturized.