Shared-Pixel Image Sensor Layout for Visible and IR Detection

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Solution Overview

Problem

Current image sensors face challenges in enhancing light sensitivity and quantum efficiency for both visible and infrared light detection, particularly in designing structures and materials that allow for efficient image capture across various wavelength ranges.

Innovation Solution

The image sensor incorporates a semiconductor substrate with both visible and infrared light detection structures within the same pixel region, utilizing a reflective layer and isolation structures to optimize light sensitivity and quantum efficiency, with the visible light detection structure overlapping the infrared light detection structure to improve photoelectric conversion performance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If both visible light detection structure and infrared light detection structure are disposed within the same pixel region, then light sensitivity and quantum efficiency are improved, but device complexity increases

Engineering Contradiction:
Improvelight sensitivityVSAvoidstructure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent combines visible light detection structure and infrared light detection structure within the same pixel region, allowing both detection functions to coexist and work simultaneously in a shared space, thereby improving light sensitivity and quantum efficiency while managing device complexity through integrated design

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The visible light detection structure is positioned to overlap with the infrared light detection structure in a nested arrangement, where the first portion is disposed between the infrared light detection structure and the second surface, and the second portion is disposed between the infrared light detection structure and the first isolation structure, enabling efficient space utilization

Inventive Principle:
Principle #7Nested doll (Nesting)

2Reliability

If visible light detection structure overlaps infrared light detection structure, then photoelectric conversion performance is improved, but manufacturing precision requirements increase

Engineering Contradiction:
Improvephotoelectric conversion performanceVSAvoidstructural alignment precision
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The visible light detection structure is divided into a first portion and a second portion, with the first portion disposed between the infrared light detection structure and the second surface of the semiconductor substrate, and the second portion disposed between the infrared light detection structure and the first isolation structure, allowing segmented optimization of alignment and manufacturing

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent utilizes vertical layering and horizontal positioning to create a three-dimensional arrangement where the visible light detection structure overlaps the infrared light detection structure in both vertical and horizontal dimensions, improving photoelectric conversion while distributing alignment requirements across multiple spatial dimensions

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enhances the light sensitivity and quantum efficiency of the image sensor, allowing for improved image capture and resolution, particularly in applications requiring both visible and infrared light detection.

Implementation Method 1

The reflective layer is disposed on the first surface of the semiconductor substrate. The infrared light detection structure is disposed between the reflective layer and the first portion of the visible light detection structure in the vertical direction

Methodology Applied
Scientific EffectReflection: Reflection

Implementation Method 2

a visible light detection structure and an infrared light detection structure are disposed within the same pixel region for improving light sensitivity, quantum efficiency, and other related properties of the image sensor

Methodology Applied
Scientific EffectPhotoelectric conversion: Photoelectric Effect

Data Source

PatentUS12142624B2Image sensor
Publication Date: 2024.11.12 UNITED MICROELECTRONICS CORP
  • US12142624B2 patent drawing
  • US12142624B2 patent drawing
  • US12142624B2 patent drawing

AI summary

An image sensor includes a semiconductor substrate having a first surface and a second surface opposite to the first surface in a vertical direction, a first isolation structure disposed in the semiconductor substrate for defining pixel regions, a visible light detection structure, an infrared light detection structure, and a reflective layer. The visible light detection structure and the infrared light detection structure are disposed within the same pixel region. The visible light detection structure includes a first portion disposed between the second surface and the infrared light detection structure in the vertical direction and a second portion disposed between the infrared light detection structure and the first isolation structure in a horizontal direction. The infrared light detection structure is disposed between the reflective layer and the first portion in the vertical direction. The second portion is not sandwiched between the reflective layer and the second surface in the vertical direction.