Shielded Semiconductor Package for 2.5D Stacked Integration

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Solution Overview

Problem

In 2.5 D/3D stacked die packaging systems, power supply noise jitter and electromagnetic interference (EMI) are significant issues due to the placement of power delivery decoupling capacitors and communication devices, which hinder device miniaturization and performance.

Innovation Solution

A shielded semiconductor package design featuring a substrate, interposer, shield frame with conductive layers, and embedded components, which reduces power inductance loop and EMI by positioning decoupling capacitors closer to the devices and using a conductive shield to isolate components.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Area of stationary object

If decoupling capacitors are placed far from stacked IC devices on package substrate, then package area is reduced, but power supply noise jitter increases

Engineering Contradiction:
Improvepackage areaVSAvoidpower supply noise jitter
Core Design Contradiction:
Area of stationary objectVSReliability

Solution Approach 1:

The patent transitions from planar placement on package substrate to three-dimensional placement on the interposer surface, allowing capacitors to be positioned in close proximity to stacked IC devices vertically rather than horizontally, thus reducing power loop inductance while maintaining compact package footprint

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The interposer serves as an intermediary platform between the package substrate and stacked IC devices, providing a dedicated surface for capacitor placement that optimizes power delivery paths without compromising package area or signal integrity

Inventive Principle:
Principle #24Intermediary (Mediator)

2Object-affected harmful factors

If device-to-device spacing is increased to mitigate EMI, then EMI shielding is improved, but interconnect length increases causing lossy transmission

Engineering Contradiction:
ImproveEMI shieldingVSAvoidinterconnect transmission loss
Core Design Contradiction:
Object-affected harmful factorsVSLoss of energy

Solution Approach 1:

The patent extracts the EMI shielding function from the interconnect structure itself and implements it through dedicated shield frames and conductive shielding layers positioned between communication devices, allowing devices to be placed in close proximity without compromising EMI performance

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

Shield frames and conductive shielding layers act as intermediary structures between communication devices, providing EMI protection while maintaining short interconnect lengths and preserving signal transmission quality

Inventive Principle:
Principle #24Intermediary (Mediator)

3Reliability

If more decoupling capacitors are added to suppress power supply noise, then power noise is reduced, but package real estate is consumed

Engineering Contradiction:
Improvepower supply noise suppressionVSAvoidpackage real estate
Core Design Contradiction:
ReliabilityVSArea of stationary object

Solution Approach 1:

The patent utilizes the vertical dimension on the interposer surface to place multiple decoupling capacitors in close proximity to stacked IC devices, achieving superior power noise suppression without consuming additional horizontal package real estate

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design achieves platform miniaturization, improved signal integrity, reduced power supply noise jitter, and enhanced EMI shielding, allowing for increased device integration and higher package ball grid array input/output density.

Implementation Method 1

a conductive shield layer on the shield frame... reduced power inductance loop and EMI by positioning decoupling capacitors closer to the devices and using a conductive shield to isolate components

Methodology Applied
Scientific EffectElectromagnetic shielding: Faraday Cage

Implementation Method 2

power delivery decoupling capacitors are disposed far apart from stacked integrated circuit devices... escalated power supply noise jitter... reduced power supply noise jitter

Methodology Applied
Scientific EffectDecoupling capacitance: Capacitance

Data Source

PatentUS11527485B2Electrical shield for stacked heterogeneous device integration
Publication Date: 2022.12.13 INTEL CORP
  • US11527485B2 patent drawing
  • US11527485B2 patent drawing
  • US11527485B2 patent drawing

AI summary

The present disclosure relates to a semiconductor package that may include a substrate, an interposer coupled to the substrate, a shield frame including at least one frame recess and at least one opening positioned over the interposer, a conductive shield layer on the shield frame, and a plurality of components coupled to the interposer.