Shock-Compensated MEMS Sensor Using Computational Model
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Solution Overview
Problem
Existing measuring devices, such as MEMS acceleration sensors and gyroscopes, are susceptible to interference from vibrations and shocks, which affect their accuracy and serviceable life, and micro flow sensors with metal threads are prone to sagging during heating, reducing their measurement sensitivity and accuracy.
Innovation Solution
A shock-sensitive measuring device incorporating a multi-axis MEMS inertial measuring unit and a computational model, such as a neural network or digital filters, to generate a compensation signal that isolates and reduces unwanted signal portions caused by shocks, allowing for improved accuracy and resistance to vibrations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If free-hanging metal threads are used as sensor elements in micro flow sensors, then measurement sensitivity is improved, but mechanical stability deteriorates due to sagging during heating
Solution Approach 1:
The patent replaces the mechanical support structure (free-hanging metal threads) with a computational approach. A computational model processes sensor signals to distinguish between genuine measurement data and artifacts caused by mechanical sagging, thereby maintaining measurement sensitivity while compensating for mechanical instability through signal processing rather than structural modification.
2Measurement precision
If computational models are used to compensate for shock-induced unwanted signals, then measurement accuracy is improved, but device complexity increases
Solution Approach 1:
The patent applies preliminary action by training the computational model during a calibration phase before actual measurement operations. The model learns the relationship between shock signals and unwanted sensor responses in advance, allowing it to automatically compensate for vibrations during normal operation without requiring complex real-time adjustments or additional hardware.
3Measurement precision
If multi-axis MEMS inertial measuring units are positioned closely to sensors, then shock detection accuracy is improved, but susceptibility to vibrations increases
Solution Approach 1:
The patent converts the harmful effect of vibrations into useful information. By positioning the MEMS inertial measuring unit close to the sensor, the system captures vibration signals that would otherwise be noise. The computational model then processes these vibration signals to identify and remove unwanted portions from the sensor output, transforming vibration susceptibility into an advantage for shock compensation.
Data Source
AI summary
A measuring device includes a sensor generating a sensor signal in dependence upon a detected measured variable, a compensating facility generating a compensation signal in response to detected shocks, and an evaluating facility generating a measurement result from a difference between the sensor signal and the compensation signal. The compensating facility includes a multi-axis MEMS inertial measuring unit having an acceleration sensor alone or together with a gyroscope and generating a plurality of movement signals in correspondence to a number of axes, and a computer including a computational model trained to model an unwanted signal portion of the sensor signal in response to the shocks caused by the movement signals, and to output the unwanted signal portion as a compensation signal. The computational mod& is trained such that absent a measured variable, the difference between the sensor signal and the compensation signal is zero or is below a predetermined threshold.