Ultrasonic Showerhead Cleaning Rack Standing Wave Alignment
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Current methods for cleaning showerheads in semiconductor manufacturing processes are inefficient, requiring repeated manual cleaning and significant time and manpower to remove pollutants, which affects production efficiency.
Innovation Solution
An ultrasonic cleaning method using a showerhead cleaning rack that secures the showerhead at a predetermined height within an ultrasonic cleaning trough to intersect with standing waves, leveraging the oscillation energy of these waves to effectively remove pollutants.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Extent of automation
If the oscillation method is used to clean the showerhead, then the cleaning process can be automated, but the cleaning effectiveness is insufficient and requires repeated manual cleaning
Solution Approach 1:
The patent applies ultrasonic vibration to the cleaning process by placing the showerhead in an ultrasonic cleaning trough. The ultrasonic waves generate mechanical vibrations that create cavitation and streaming effects in the cleaning fluid, enabling effective removal of pollutants from the showerhead surface. This resolves the contradiction by providing both automation and high cleaning effectiveness through the ultrasonic vibration mechanism.
2Reliability
If repeated cleaning is performed to remove all pollutants, then the cleaning thoroughness is improved, but the cleaning time and manpower increase significantly
Solution Approach 1:
The patent replaces manual mechanical cleaning with ultrasonic vibration-based cleaning. The ultrasonic waves generate strong mechanical effects including cavitation, where bubbles form and collapse violently, creating micro-jets that impact and remove contaminants. This substitution eliminates the need for repeated manual cleaning operations while achieving thorough cleaning results, thus reducing both time and manpower requirements.
3Productivity
If the showerhead is placed at a predetermined height to intersect with standing waves, then the cleaning efficiency is improved, but the device complexity increases
Solution Approach 1:
The patent applies preliminary action by pre-positioning the showerhead at a predetermined height before initiating the ultrasonic cleaning process. The cleaning rack is designed with adjustable positioning mechanisms that allow the showerhead to be placed at the optimal height where standing waves will intersect, maximizing cleaning efficiency before the ultrasonic waves are generated. This preliminary positioning ensures high productivity without requiring complex real-time adjustment systems during the cleaning process.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The ultrasonic cleaning method significantly reduces cleaning time and manpower by utilizing the strong oscillation energy of standing waves to thoroughly clean pollutants from showerheads, enhancing production efficiency.
Implementation Method 1
the ultrasonic wave generator generates a plurality of standing waves in the ultrasonic cleaning trough
Implementation Method 2
When the ultrasonic cleaning trough generates the ultrasonic wave, the ultrasonic wave oscillates and cleans the pollutants on the showerhead
Implementation Method 3
the standing waves oscillate so as to clean the pollutants on the showerhead
Data Source
AI summary
A showerhead cleaning rack is disclosed. The showerhead cleaning rack includes a frame and a support body, wherein the support body is located and connected with the frame. The support body has a plurality of positioning parts. The positioning parts are used for holding the showerhead. The showerhead cleaning rack is used in an ultrasonic cleaning trough. By utilizing the oscillation of the ultrasonic wave generated in the ultrasonic cleaning trough, the pollutants on the showerhead is cleaned. An ultrasonic cleaning method with the showerhead cleaning rack is also provided.


