Ultrasonic Showerhead Cleaning Rack Standing Wave Alignment

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Solution Overview

Problem

Current methods for cleaning showerheads in semiconductor manufacturing processes are inefficient, requiring repeated manual cleaning and significant time and manpower to remove pollutants, which affects production efficiency.

Innovation Solution

An ultrasonic cleaning method using a showerhead cleaning rack that secures the showerhead at a predetermined height within an ultrasonic cleaning trough to intersect with standing waves, leveraging the oscillation energy of these waves to effectively remove pollutants.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Extent of automation

If the oscillation method is used to clean the showerhead, then the cleaning process can be automated, but the cleaning effectiveness is insufficient and requires repeated manual cleaning

Engineering Contradiction:
Improveautomation of cleaning processVSAvoidcleaning effectiveness
Core Design Contradiction:
Extent of automationVSReliability

Solution Approach 1:

The patent applies ultrasonic vibration to the cleaning process by placing the showerhead in an ultrasonic cleaning trough. The ultrasonic waves generate mechanical vibrations that create cavitation and streaming effects in the cleaning fluid, enabling effective removal of pollutants from the showerhead surface. This resolves the contradiction by providing both automation and high cleaning effectiveness through the ultrasonic vibration mechanism.

Inventive Principle:
Principle #18Mechanical vibration

2Reliability

If repeated cleaning is performed to remove all pollutants, then the cleaning thoroughness is improved, but the cleaning time and manpower increase significantly

Engineering Contradiction:
Improvecleaning thoroughnessVSAvoidcleaning time
Core Design Contradiction:
ReliabilityVSLoss of time

Solution Approach 1:

The patent replaces manual mechanical cleaning with ultrasonic vibration-based cleaning. The ultrasonic waves generate strong mechanical effects including cavitation, where bubbles form and collapse violently, creating micro-jets that impact and remove contaminants. This substitution eliminates the need for repeated manual cleaning operations while achieving thorough cleaning results, thus reducing both time and manpower requirements.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Productivity

If the showerhead is placed at a predetermined height to intersect with standing waves, then the cleaning efficiency is improved, but the device complexity increases

Engineering Contradiction:
Improvecleaning efficiencyVSAvoidcleaning rack structure
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The patent applies preliminary action by pre-positioning the showerhead at a predetermined height before initiating the ultrasonic cleaning process. The cleaning rack is designed with adjustable positioning mechanisms that allow the showerhead to be placed at the optimal height where standing waves will intersect, maximizing cleaning efficiency before the ultrasonic waves are generated. This preliminary positioning ensures high productivity without requiring complex real-time adjustment systems during the cleaning process.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The ultrasonic cleaning method significantly reduces cleaning time and manpower by utilizing the strong oscillation energy of standing waves to thoroughly clean pollutants from showerheads, enhancing production efficiency.

Implementation Method 1

the ultrasonic wave generator generates a plurality of standing waves in the ultrasonic cleaning trough

Methodology Applied
Scientific EffectUltrasonic wave: Ultrasound

Implementation Method 2

When the ultrasonic cleaning trough generates the ultrasonic wave, the ultrasonic wave oscillates and cleans the pollutants on the showerhead

Methodology Applied
Scientific EffectStanding wave:

Implementation Method 3

the standing waves oscillate so as to clean the pollutants on the showerhead

Methodology Applied
Scientific EffectOscillation energy: Vibration

Data Source

PatentUS8673083B2Method of cleaning showerhead
Publication Date: 2014.03.18 MICRON TECHNOLOGY INC
  • US8673083B2 patent drawing
  • US8673083B2 patent drawing
  • US8673083B2 patent drawing

AI summary

A showerhead cleaning rack is disclosed. The showerhead cleaning rack includes a frame and a support body, wherein the support body is located and connected with the frame. The support body has a plurality of positioning parts. The positioning parts are used for holding the showerhead. The showerhead cleaning rack is used in an ultrasonic cleaning trough. By utilizing the oscillation of the ultrasonic wave generated in the ultrasonic cleaning trough, the pollutants on the showerhead is cleaned. An ultrasonic cleaning method with the showerhead cleaning rack is also provided.