Process Shutter Disc Positioning for Sensor-Free Vacuum Handling
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Solution Overview
Problem
Existing process shutter arrangements in vacuum equipment for semiconductor and optical industries are laborious and prone to precision issues due to thermal expansion and require sophisticated multi-sensor systems, necessitating a solution for light, dimensionally minimized components that enable high precision and fast movement.
Innovation Solution
A process shutter arrangement featuring a shutter disc with three positioning mortises and a shutter arm with corresponding tenons, made from lightweight yet stiff materials like ceramic or titanium, which allows precise positioning without complex sensors, and a vacuum process system with a control unit to coordinate the rotational movement and linear pin movement for precise disc placement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If traditional process shutter arrangements use modified cover-rings and additional installations to prevent mutual movement, then positioning stability is improved, but device complexity and installation labor increase
Solution Approach 1:
The positioning function is merged into the fundamental structure of the shutter disc and shutter arm through mortises and tenons. The mortises are directly formed in the shutter disc body, and the tenons are integrated into the shutter arm, eliminating the need for separate cover-rings and additional positioning installations. This integration maintains positioning stability while significantly reducing device complexity.
Solution Approach 2:
The shutter disc and shutter arm perform their own positioning function through the built-in mortises and tenons. The mortises in the shutter disc directly receive the tenons from the shutter arm, creating a self-contained positioning system that does not require external cover-rings or additional positioning components. The structure serves itself for positioning without external assistance.
2Manufacturing precision
If multi-sensor systems are used to detect and center the shutter disc, then positioning precision is improved, but device complexity and cost increase
Solution Approach 1:
The mechanical positioning system using mortises and tenons replaces the need for sophisticated multi-sensor detection systems. The precise fit between the mortises in the shutter disc and the tenons on the shutter arm provides inherent mechanical guidance and centering, eliminating the requirement for electronic sensors, robotic control systems, and complex detection algorithms.
Solution Approach 2:
The shutter disc and shutter arm automatically achieve precise positioning through the geometric relationship between mortises and tenons. The radial axes of the mortises intersect at the center of the outer diameter, and the tenons align with these axes, providing self-centering capability without external sensor systems. The structure itself performs the positioning function that would otherwise require complex electronic detection.
3Strength
If robust construction with heavy materials is used for the shutter disc and arm, then structural strength is improved, but movement speed and positioning responsiveness decrease
Solution Approach 1:
The patent specifies using lightweight yet stiff materials such as ceramic or titanium for the shutter disc and shutter arm. These composite or advanced materials provide high structural strength and rigidity while maintaining low density. The material composition enables fast rotational movement and quick positioning response without sacrificing the structural integrity needed to withstand vacuum conditions and processing loads.
Data Source
AI summary
A process shutter arrangement for a vacuum process system is disclosed. The arrangement includes a shutter disc having an essentially circumferential outer diameter DDo, a thickness t, a first surface, and a second surface. The disc includes at least three positioning mortises in the first surface near the outer diameter DDo. Each mortise being centered with respect to a radially axis ξ1-3 in an xy-plane of the disc and having two long sides a positioned in parallel or right angled to the respective axis ξ1-3. A shutter arm includes a bearing sickle with an inner periphery DSi, and at least three positioning tenons near or adjacent to the inner diameter DSi, and corresponding with positioning mortises to position the disc when set on the positioning tenons or on an optional bearing surface of the sickle.