SiC Semiconductor Component Diode Region Bipolar Current Isolation

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Solution Overview

Problem

In silicon carbide (SiC) semiconductor components with field effect transistor structures, the intrinsic body diode's operation can degrade transistor properties due to bipolar reverse current, leading to increased electrical resistance and potential crystal damage from charge carrier recombination, which affects the component's performance and reliability.

Innovation Solution

A SiC semiconductor component design incorporating a drift structure with a diode region that forms a third pn junction with the drift zone, having a higher emitter efficiency than the doping region, allowing the diode region to handle the bipolar reverse current without impacting transistor cell performance, thereby isolating the bipolar degradation from the transistor cells.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the intrinsic body diode is used for reverse current handling, then the reverse diode function is provided, but bipolar reverse current causes increased electrical resistance and potential crystal damage

Engineering Contradiction:
Improvecomponent reliabilityVSAvoidbipolar reverse current damage
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The semiconductor component is divided into distinct functional regions: transistor cells for forward conduction and a separate diode region for reverse current handling. The diode region is formed between the transistor cells and the side surface, creating a spatial separation that isolates bipolar degradation from the transistor cells while maintaining both functions within a single component structure

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The diode region acts as an intermediary structure that specifically handles the bipolar reverse current. By forming a third pn junction between the drift structure and the diode region, it serves as a dedicated pathway for reverse current, protecting the transistor cells from the harmful effects of bipolar operation

Inventive Principle:
Principle #24Intermediary (Mediator)

2Reliability

If the diode region with higher emitter efficiency is formed, then bipolar reverse current is effectively managed, but the device structure becomes more complex

Engineering Contradiction:
Improvereverse current handlingVSAvoidsemiconductor structure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The diode region is merged with the existing transistor cell structure, sharing common elements such as the drift structure and load electrode. The diode region forms a third pn junction with the drift structure and is electrically connected to the first load electrode, combining reverse diode functionality with the transistor architecture without requiring completely separate structures

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

Different regions of the semiconductor component are given different functional properties: the transistor cells are optimized for forward conduction with their doping regions and source regions, while the diode region is specifically designed with higher emitter efficiency for reverse current handling. This local differentiation allows each region to perform its specialized function effectively

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The diode region effectively manages the bipolar reverse current, minimizing its impact on the transistor cells, maintaining the component's performance and preventing crystal damage, thus ensuring the SiC semiconductor component operates efficiently without compromising its forward operation characteristics.

Implementation Method 1

forms a third pn junction with the drift structure

Methodology Applied
Scientific Effectpn junction:

Implementation Method 2

potential crystal damage from charge carrier recombination

Methodology Applied
Scientific Effectcharge carrier recombination:

Data Source

PatentUS11177380B2Silicon carbide semiconductor component
Publication Date: 2021.11.16 INFINEON TECHNOLOGIES AG
  • US11177380B2 patent drawing
  • US11177380B2 patent drawing
  • US11177380B2 patent drawing

AI summary

A drift structure having a drift zone of a first conductivity type is formed in a SiC semiconductor body of a semiconductor component. Transistor cells each include a doping region and a source region in the SiC semiconductor body. The doping region forms a first pn junction with the drift structure and a second pn junction with the source region. The doping region is electrically connected to a first load electrode. A diode region is formed between the transistor cells and a side surface of the SiC semiconductor body. The diode region is electrically connected to the first load electrode and forms a third pn junction with the drift structure. An emitter efficiency of the diode region is higher than an emitter efficiency of the doping region.