SiC P-N Junction Indentation for Controlled Color Center Emission

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Solution Overview

Problem

Current methods for manufacturing light-emitter devices, such as SiC-based P-N junction devices, require complex processes and are impractical for widespread use due to the need for cryogenic temperatures and high inhomogeneity conditions, and lack control over spatially introduced defects for precise photon emission.

Innovation Solution

A method involving controlled mechanical processes to introduce defects and energy levels within the SiC bandgap, reducing manufacturing steps and allowing for micron-scale control of defect positions, utilizing nanoindentation to create indentations in the depletion region of a P-N junction device, thereby modifying the energy band structure and enhancing photon emission control.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If ion implantation is used to introduce defects for single-photon emission, then photon emission control is improved, but device complexity and manufacturing difficulty increase

Engineering Contradiction:
Improvedefect position controlVSAvoidmanufacturing process complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent replaces the complex ion implantation process with a simpler mechanical indentation process. By using a physical indenter to create localized defects through mechanical stress, the invention eliminates the need for complex ion implantation equipment and processes, while still achieving precise defect introduction for single-photon emission control

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent changes the method of defect introduction from chemical/physical ion implantation to mechanical indentation. By altering the fundamental parameter of how defects are created (from particle bombardment to mechanical stress), the invention simplifies the manufacturing process while maintaining control over defect positions for photon emission

Inventive Principle:
Principle #35Parameter changes

2Reliability

If cryogenic temperatures and high inhomogeneity conditions are used for single-photon sources, then photon emission performance is improved, but ease of manufacture and widespread use deteriorates

Engineering Contradiction:
Improvesingle-photon emission performanceVSAvoidmanufacturing simplicity
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The patent enables the device to maintain reliable single-photon emission performance under normal operating conditions without requiring external cryogenic temperature control systems. The mechanical indentation method creates defects that are stable and functional at standard temperatures, making the device self-sufficient and easier to manufacture

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The patent extracts the requirement for cryogenic temperature control and high inhomogeneity conditions from the single-photon source design. By using mechanical indentation to create stable defects, the invention removes these complex environmental requirements, enabling simpler manufacturing and broader application

Inventive Principle:
Principle #2Taking out (Extraction)

3Manufacturing precision

If multiple manufacturing steps are used to introduce defects, then defect control is improved, but productivity decreases

Engineering Contradiction:
Improvedefect introduction controlVSAvoidmanufacturing speed
Core Design Contradiction:
Manufacturing precisionVSProductivity

Solution Approach 1:

The patent performs defect introduction as a preliminary action during the device fabrication process itself, rather than requiring separate post-processing steps. The mechanical indentation is integrated into the manufacturing flow, allowing defects to be created and positioned before final device assembly, thereby improving productivity without sacrificing precision

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent merges the defect introduction step with the device manufacturing process. By combining what would traditionally be separate operations (device fabrication and defect introduction) into a single integrated process using mechanical indentation, the invention eliminates redundant steps and improves manufacturing efficiency

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach simplifies the manufacturing process, enables precise control of defect positions, and improves the efficiency and control of photon emission, allowing for robust and cost-effective light-emitter devices capable of emitting single photons on demand, suitable for various applications including proximity sensing.

Implementation Method 1

A method involving controlled mechanical processes to introduce defects and energy levels within the SiC bandgap... utilizing nanoindentation to create indentations in the depletion region of a P-N junction device, thereby modifying the energy band structure and enhancing photon emission control

Methodology Applied
Scientific EffectMechanical stress-induced defect generation: Deformation

Implementation Method 2

SiC-based single-photon sources have been devised, characterized by a very low light emission in NIR range... the electro-optical performance of a device was monitored... He-ions irradiation is demonstrated to generate color centers and, at the same time, to quench undesired emission in the visible range

Methodology Applied
Scientific EffectElectroluminescence: Electroluminescence

Data Source

PatentUS20240162371A1Light-emitter device with induced defects and method of manufacturing the light emitter device
Publication Date: 2024.05.16 STMICROELECTRONICS SRL
  • US20240162371A1 patent drawing
  • US20240162371A1 patent drawing
  • US20240162371A1 patent drawing

AI summary

A light-emitter device comprising: a body of solid-state material; and a P-N junction in the body, including: a cathode region, having N-type conductivity; an anode region, having P-type conductivity, extending in direct contact with the cathode region and defining a light-emitting surface; and a depletion region around an interface between the anode and the cathode regions. The light-emitting surface has at least one indentation that extends towards the depletion region. The depletion region has a peak defectiveness area, housing irregularities in crystal lattice, in correspondence of said at least one indentation. The defectiveness area, which includes point defects, line defects, bulk defects, etc., is generated as a direct consequence of the formation of the indentation by an indenter or nanoindenter system. In the defectiveness area color centers are generated.