Integrated SiC Pressure-Temperature Sensing With Thermal Compensation
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Solution Overview
Problem
Current pressure and temperature sensing technologies for aero-engine combustion chambers face challenges in accurately measuring pressure and temperature simultaneously due to the sensitivity of piezoresistive pressure sensors to temperature changes and the need for separate transducers, which are costly and prone to damage in high-temperature environments.
Innovation Solution
Integration of silicon carbide (SiC) pressure and temperature sensors on a single SiC substrate, allowing for simultaneous measurement of pressure and temperature, with temperature compensation techniques to mitigate the effects of temperature on pressure measurements.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If piezoresistive pressure sensors are used for pressure measurement, then pressure sensing capability is achieved, but temperature sensitivity causes measurement accuracy deterioration
Solution Approach 1:
The patent combines a pressure sensor and a temperature sensor into a single integrated sensor unit. The temperature sensor measures the actual temperature at the sensor location, and this temperature information is used to compensate for temperature-induced errors in the pressure measurement, thereby maintaining measurement accuracy in high-temperature environments
Solution Approach 2:
The patent implements a feedback mechanism where the temperature sensor continuously monitors the temperature at the sensor location and this temperature information is fed back to adjust or compensate the pressure measurement readings, correcting for temperature drift in real-time
2Adaptability or versatility
If separate pressure and temperature transducers are inserted into separate borescopes, then both parameters can be measured, but device complexity and cost increase
Solution Approach 1:
The patent integrates both pressure sensing and temperature sensing functions into a single sensor chip or sensor unit, eliminating the need for separate pressure and temperature transducers and their respective installation points, thereby reducing system complexity while maintaining dual parameter measurement capability
Solution Approach 2:
The integrated sensor unit performs multiple functions - both pressure measurement and temperature measurement - within a single device, making the system more versatile without requiring additional separate transducers or installation infrastructure
3Reliability
If pressure transducers are placed several feet away from the combustion chamber, then sensor damage is prevented, but acoustic reflections and attenuation cause measurement accuracy loss
Solution Approach 1:
The patent changes the material parameters of the sensor, specifically using silicon carbide (SiC) which has high thermal resistance and can withstand high temperatures. This material parameter change allows the sensor to be placed in close proximity to the combustion chamber without suffering from thermal damage, thereby eliminating acoustic reflections and attenuation issues while maintaining measurement accuracy
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate, real-time translation of pressure as a function of temperature, reducing costs and simplifying integration, while preventing sensor damage in high-temperature environments, thus improving the validation of computational fluid dynamics codes and engine health monitoring.
Implementation Method 1
the output response of piezoresistive based pressure sensors is sensitive to changes in temperature
Implementation Method 2
Integration of silicon carbide (SiC) pressure and temperature sensors on a single SiC substrate
Data Source
AI summary
An integration of silicon carbide (SiC) pressure sensor and a temperature sensor on a single SiC substrate to facilitate the simultaneous measurement of pressure and temperature at temperature, and a method of fabricating the same.