Sidewall Waveguide Coupler for Photodetector Mode Matching

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Solution Overview

Problem

Significant mode mismatch between waveguides with thin silicon cores and photodetectors with thick germanium or silicon germanium light absorption layers leads to degraded coupling efficiency and reduced photodetector performance.

Innovation Solution

A photonic structure with a waveguide-to-photodetector coupler oriented along the sidewall of a polarization-independent photodetector, featuring a tapered adiabatic optical coupler with stacked cores to facilitate mode matching and improve coupling efficiency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If a waveguide with a thin silicon core is coupled to a photodetector with a thick germanium or silicon germanium light absorption layer, then the photodetector can absorb more light, but significant mode mismatch occurs leading to degraded coupling efficiency

Engineering Contradiction:
Improvelight absorption capacityVSAvoidcoupling efficiency
Core Design Contradiction:
Quantity of substanceVSReliability

Solution Approach 1:

The patent introduces an intermediary structure (the coupler with stacked cores) between the waveguide and photodetector to bridge the mode mismatch. The stacked cores progressively transform the optical mode from the thin waveguide core to match the thick photodetector absorption layer, enabling both high light absorption and efficient coupling.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent transitions from a single-plane coupling interface to a three-dimensional stacked core structure. By adding the vertical dimension with multiple stacked cores of varying dimensions, the system can progressively match modes between the thin waveguide core and thick absorption layer, resolving the contradiction between absorption capacity and coupling efficiency.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Ease of manufacture

If the thick Ge or SiGe light absorption layer is epitaxially grown on a recessed section of a Si layer, then the photodetector structure is formed, but the mode mismatch is exacerbated

Engineering Contradiction:
Improvephotodetector structure formationVSAvoidcoupling efficiency
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The coupler with stacked cores serves as a mediator that compensates for the mode mismatch introduced by the recessed section structure. The stacked cores provide a gradual transition that bridges the geometric discontinuity between the waveguide and the photodetector's recessed absorption layer.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Device complexity

If a conventional direct coupling between waveguide and photodetector is used, then the structure is simple, but mode mismatch leads to reduced photodetector performance

Engineering Contradiction:
Improvecoupling structureVSAvoidphotodetector performance
Core Design Contradiction:
Device complexityVSReliability

Solution Approach 1:

The patent adds vertical stacking of cores to the coupling structure, transitioning from a simple planar interface to a multi-layered three-dimensional structure. This dimensional addition enables mode matching while maintaining manufacturability through standard semiconductor fabrication processes.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The proposed solution enhances coupling efficiency and photodetector performance by effectively matching modes between the waveguide and the photodetector, thereby improving the conversion of light signals into current.

Implementation Method 1

a tapered adiabatic optical coupler with stacked cores to facilitate mode matching

Methodology Applied
Scientific EffectAdiabatic mode transformation:

Implementation Method 2

allowing light signals (i.e., photons) from the waveguide to be received by the photodetector and converted into current

Methodology Applied
Scientific EffectPhotoelectric effect: Photoelectric Effect

Data Source

PatentUS12278297B2Photonic structure with waveguide-to-photodetector coupler oriented along sidewall of a photodetector
Publication Date: 2025.04.15 GLOBALFOUNDRIES US INC
  • US12278297B2 patent drawing
  • US12278297B2 patent drawing
  • US12278297B2 patent drawing

AI summary

Disclosed are embodiments of a photonic structure with at least one tapered coupler positioned laterally adjacent and along the length of a sidewall of a layer, such as a light absorption layer (LAL), of a photodetector to facilitate mode matching. Some embodiments include a vertically oriented photodetector, which is on an insulator layer and has an LAL stacked between bottom and top semiconductor layers, and a coupler, which is on the insulator layer positioned laterally adjacent to the photodetector and has stacked cores with one of the cores being at the same level as the LAL. Other embodiments include a horizontally oriented photodetector, which is on an insulator layer and has an LAL on a recessed section of a bottom semiconductor layer between side sections, and coupler(s), which is/are above side section(s) of the bottom semiconductor layer and, thus, positioned laterally adjacent to one or both sides of the LAL.