Segmented Silicon Electrode Ring Joined with Boron Oxide
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Solution Overview
Problem
The high cost of manufacturing silicon components for dry etching apparatuses is due to the need for large-diameter silicon crystal ingots, which can be mitigated by joining multiple silicon members instead of using a single-piece component.
Innovation Solution
A ring for an electrode is fabricated by joining multiple silicon members with a eutectic alloy, such as Al, Ga, or Sn, or using boron oxide as the joining material, allowing for the use of smaller silicon crystal ingots, reducing the size and cost of the components.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a one-piece silicon component is used for the focus ring, then the structural integrity and performance are maintained, but the manufacturing cost increases due to the need for large-diameter silicon crystal ingots
Solution Approach 1:
The focus ring is divided into multiple arc-shaped silicon members that are joined together to form the complete ring. This segmentation allows each member to be cut from smaller-diameter silicon crystal ingots, reducing material cost while the joining process maintains the structural integrity needed for functional performance.
2Ease of manufacture
If multiple silicon members are joined together to form the focus ring, then the manufacturing cost is reduced by using smaller silicon crystal ingots, but the structural integrity and reliability may be compromised
Solution Approach 1:
A joining material is introduced as an intermediary substance between the silicon members to bond them together. This joining material enables the multiple silicon members to be securely connected, maintaining the structural integrity and reliability of the focus ring while allowing the use of smaller, more cost-effective silicon crystal ingots.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables the production of silicon components for dry etching apparatuses using smaller silicon members, reducing manufacturing costs and maintaining the integrity and performance required for the components.
Implementation Method 1
The joining part contains boron oxide
Implementation Method 2
The joining part contains any of Al, Ga, Ge, and Sn, and contains a eutectic alloy with silicon
Data Source
AI summary
A ring for an electrode includes three or more silicon members having an arc shape and a joining part joining the silicon members. The joining part contains boron oxide.A clean copy of the amended abstract is provided in Exhibit A of this preliminary amendment.