Silicon Nitride Window for High-Temperature X-Ray Detection

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Solution Overview

Problem

Conventional data collection systems face challenges in accurately detecting X-rays from samples at elevated temperatures due to interference from photons emitted by the sample, which can overwhelm the signal detector and hinder precise material analysis.

Innovation Solution

Incorporating a signal detector with a silicon nitride window coated with a reflective material that reflects photons while allowing X-rays to pass through, enabling the detector to be positioned closer to the heated sample and minimizing interference from photons, thus enhancing the detection of characteristic X-rays.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If the signal detector is positioned close to the heated sample to improve X-ray detection efficiency, then the detection sensitivity is improved, but the detector is overwhelmed by photons emitted by the hot sample

Engineering Contradiction:
ImproveX-ray detection sensitivityVSAvoidphoton interference
Core Design Contradiction:
Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

A silicon nitride window is introduced as an intermediary component between the heated sample and the detection material. This window selectively transmits X-rays while blocking photons from the hot sample, allowing the detector to be positioned close to the sample without being overwhelmed by photon interference. The window acts as a mediator that separates the harmful photons from the useful X-ray signal.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The detection system is segmented into distinct functional components: the silicon nitride window that filters radiation, the detection material that detects X-rays, and the reflective coating that manages photon interference. This segmentation allows each component to perform its specific function optimally, with the window handling photon blocking and the detection material handling X-ray detection.

Inventive Principle:
Principle #1Segmentation

2Device complexity

If a conventional detector window material is used, then the detector structure is simple, but the material cannot withstand high temperatures and block photons effectively

Engineering Contradiction:
Improvedetector structureVSAvoidhigh temperature resistance
Core Design Contradiction:
Device complexityVSReliability

Solution Approach 1:

The detector window is constructed from silicon nitride, a composite material that combines the properties of silicon with nitrogen to create a substance that is both mechanically robust and resistant to high temperatures. This composite material can withstand the thermal environment of heated samples while maintaining its structural integrity and photon-blocking capabilities.

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The window material is selected based on its thermal and optical parameters - specifically its ability to withstand high temperatures and its transparency to X-rays while opacity to photons. By changing the material parameter from conventional window materials to silicon nitride, the system achieves both high temperature resistance and selective radiation transmission.

Inventive Principle:
Principle #35Parameter changes

3Device complexity

If the detection material is exposed to photons from the heated sample, then the detector can be simpler, but the measurement accuracy of X-rays deteriorates

Engineering Contradiction:
Improvedetector configurationVSAvoidX-ray measurement accuracy
Core Design Contradiction:
Device complexityVSMeasurement precision

Solution Approach 1:

The silicon nitride window serves as a protective intermediary that shields the detection material from photon exposure while allowing X-rays to pass through. This intermediary layer prevents photons from reaching and overwhelming the detection material, thereby maintaining measurement accuracy without requiring complex shielding configurations.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The silicon nitride window, which blocks photons that would otherwise interfere with detection, is positioned to also reflect some photons away from the detection path. By converting the potential harm of photon exposure into a beneficial filtering effect, the system improves X-ray measurement accuracy while maintaining a relatively simple detector configuration.

Inventive Principle:
Principle #22Blessing in disguise (Convert harm into benefit)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration improves the accuracy of X-ray detection and measurement by reducing photon interference, allowing for more precise analysis of materials at elevated temperatures, even when the sample emits photons in various wavelength ranges.

Implementation Method 1

a reflective coating on a silicon nitride window of the signal detector

Methodology Applied
Scientific EffectReflection: Reflection

Implementation Method 2

allowing X-rays to pass through

Methodology Applied
Scientific EffectX-ray transmission: X-Ray

Implementation Method 3

The sample stage includes a heating element, and the heating element is capable of heating at least a portion of the sample stage to at least 100 Celsius

Methodology Applied
Scientific EffectHeating: Heating

Implementation Method 4

The interaction of the energy beam 104 and the sample 102 causes the atoms of the sample 102 to become excited. When an electron or electrons of an atom relaxes to a lower-energy ground state, the atom will emit energy in the form of an X-ray

Methodology Applied
Scientific EffectX-ray emission: X-Ray

Data Source

PatentUS10656106B2Systems and methods for in situ high temperature X-ray spectroscopy in electron microscopes
Publication Date: 2020.05.19 GATAN INC
  • US10656106B2 patent drawing
  • US10656106B2 patent drawing
  • US10656106B2 patent drawing

AI summary

In some embodiments, a system for collecting information from a sample includes a sample stage and one or more signal detectors. The sample stage includes a heating element, and the heating element is capable of heating at least a portion of the sample stage to at least 100 Celsius. The one or more signal detectors has a detection material with a silicon nitride window positioned between the detection material and the sample stage.