Silicon Particle Detector Segmented Pads Protection Rings

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Solution Overview

Problem

Ultra-fast silicon detectors face challenges in recognizing particles that generate out-of-time signals due to delayed signal arrival when particles pass through the gaps between pads, leading to incorrect time measurement.

Innovation Solution

Incorporating a protection ring made of the same material as the pads but with deeper implantation surrounding each multiplication layer, preventing particles between pads from reaching the multiplication layer and minimizing delayed signals.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Area of stationary object

If particles pass through gaps between pads, then detection coverage is improved, but signal timing accuracy deteriorates due to delayed signal arrival

Engineering Contradiction:

Improvedetection coverageVSAvoidsignal timing accuracy

Core Design Contradiction:

Area of stationary objectVSMeasurement precision

Solution Approach 1:

The invention extracts and removes the harmful effect of gap regions by introducing protection rings that actively prevent charge carrier collection in gap areas. The protection rings are implanted in the semiconductor substrate at the same depth as the multiplication layer, creating regions that repel or block charge carriers generated in the gaps, thereby eliminating the source of delayed signals while preserving pad region detection.

Inventive Principle:

Principle #2Taking out (Extraction)

Solution Approach 2:

The protection rings serve as intermediary structures between the multiplication layer and the gap regions. These rings act as mediators that intercept charge carriers from gap regions before they can reach the multiplication layer, preventing the harmful delayed signals from being generated while allowing normal detection in pad regions to proceed uninterrupted.

Inventive Principle:

Principle #24Intermediary (Mediator)

2Power

If multiplication layer is placed beneath pads, then signal amplification is improved, but delayed signals from gap regions worsen due to charge carrier diffusion time

Engineering Contradiction:

Improvesignal amplificationVSAvoidsignal delay

Core Design Contradiction:

PowerVSLoss of time

Solution Approach 1:

The invention segments the detector structure by introducing protection rings that divide the semiconductor substrate into distinct functional regions: pad regions for signal amplification and gap regions for charge carrier rejection. This segmentation allows the multiplication layer to operate at full amplification power beneath the pads while the protection rings simultaneously prevent delayed signals from gap regions from contaminating the signal.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The protection rings provide local quality differentiation by creating regions with different electrical properties in different locations. In pad regions, the multiplication layer provides high gain for amplified signals, while in gap regions, the protection rings create regions that actively reject charge carriers. This local differentiation allows simultaneous optimization of both signal amplification and delay prevention.

Inventive Principle:

Principle #3Local quality

3Measurement precision

If pad segmentation is increased for better spatial localization, then spatial resolution is improved, but gap regions between pads increase leading to more delayed signals

Engineering Contradiction:

Improvespatial resolutionVSAvoiddelayed signals from gaps

Core Design Contradiction:

Measurement precisionVSObject-generated harmful factors

Solution Approach 1:

The protection rings are implanted in advance during the fabrication process, before the detector begins operation. This preliminary action ensures that the harmful gap regions are pre-configured with charge carrier rejection capabilities, so that when particles pass through segmented pads with improved spatial resolution, the corresponding protection rings are already in place to prevent delayed signals from the resulting smaller gap regions.

Inventive Principle:

Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design enhances signal accuracy by eliminating negligible contributions from particles between pads and increases detector resistance to electric breakdowns, while maintaining the detector's ultra-fast response.

Implementation Method 1

a plurality of multiplication layers capable of avalanche-multiplying the electric charges generated in the absorption layer

Methodology Applied

Scientific EffectAvalanche multiplication: Avalanche Breakdown

Data Source

PatentUS10811555B2Particle detector capable of separating in-time signals from out-of-time signals

Publication Date: 2020.10.20 ISTITUTO NAZIONALE DI FISICA NUCLEARE

AI summary

Silicon Particle Detector, comprising an absorption region (10) capable of generating electrical charges in response to a particle passing therethrough, a first and a second electrode (20, 30) arranged on opposite sides of the absorption region (10), wherein the first electrode (20) is segmented into a plurality of pads (20a), and a plurality of multiplication layers (40) able to avalanche-multiply the electric charges generated in the absorption region (10), each of the multiplication layers (40) being arranged beneath a respective pad (20a) and interposed between it and the absorption region (10), each multiplication layer (40) is surrounded by a respective protection ring (50) formed by the material of the pad (20a). The protection ring (50) is laterally interposed between the multiplication layer (40) and the absorption region (10).