Silicon Side-Product Hydrolysis Monitoring via NMR Bond Analysis
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing methods for treating silicon-containing side-products generated in semiconductor manufacturing lack a reliable method to determine the completion of neutralizing decomposition or hydrolysis, leading to unsafe and inefficient treatment processes.
Innovation Solution
A method involving chemical analysis of Si-α bonds and Si—H bonds in the side-product, using nuclear magnetic resonance spectroscopy, to monitor the progress of treatment through contact with water or basic aqueous solutions, ensuring complete neutralizing decomposition.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If the side-product is treated by contact with water or basic aqueous solution, then the explosivity and inflammability are eliminated, but there is no reliable method to determine the completion of treatment
Solution Approach 1:
The patent applies feedback by using NMR spectroscopy to continuously monitor the treatment process. The chemical analysis provides real-time information about the remaining Si-α bonds and Si-H bonds, allowing operators to determine when the treatment is complete and adjust the process accordingly to ensure complete neutralizing decomposition.
Solution Approach 2:
The patent replaces mechanical or empirical methods of determining treatment completion with chemical analysis using NMR spectroscopy. This scientific method provides objective, quantitative measurement of bond types and concentrations, enabling reliable determination of treatment completion without relying on mechanical sensors or empirical rules.
2Object-affected harmful factors
If the treatment process is extended to ensure complete decomposition, then safety is improved, but treatment time and efficiency deteriorate
Solution Approach 1:
The NMR-based feedback system allows operators to monitor treatment progress in real-time and stop the treatment process as soon as complete decomposition is confirmed. This eliminates unnecessary extended treatment time while ensuring safety, optimizing the balance between safety and treatment duration.
Solution Approach 2:
The patent replaces time-based empirical treatment protocols with science-based determination using NMR spectroscopy. Instead of treating all materials for a fixed extended period, the process uses chemical analysis to determine the exact moment when decomposition is complete, reducing unnecessary treatment time while maintaining safety.
3Measurement precision
If chemical analysis is performed to monitor treatment progress, then determination precision is improved, but device complexity and cost increase
Solution Approach 1:
The patent uses NMR spectroscopy, a well-established chemical analysis technique, to provide precise determination of treatment completion. While this requires specialized equipment, the method offers superior measurement precision compared to alternative approaches, and the equipment can be utilized for other analytical purposes as well.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Ensures safe and efficient treatment of silicon-containing side-products by breaking all Si-α and Si—H bonds, eliminating explosivity and inflammability, and maintaining a stable pH, thereby making the process safer and more effective.
Implementation Method 1
The treatment fluid includes water. The determination method determines progress of the treatment of the side-product based on a signal according to a chemical analysis of at least one of an Si-α bond (α is at least one selected from the group consisting of F, Cl, Br, and I) and an Si—H bond, of the first solid matter.
Data Source
AI summary
According to one embodiment, a determination method is provided. The determination method determines progress of a treatment of a side-product produced in a process of reacting a substance containing a halogen and silicon or reacting a substance containing silicon and a substance containing a halogen. The treatment of the side-product includes bringing the side-product into contact with a treatment fluid containing water to obtain a first solid matter. The determination method includes determining the progress of the treatment of the side-product based on a signal according to a chemical analysis of at least one of an Si-α bond (α is at least one selected from the group consisting of F, Cl, Br, and I) and an Si—H bond, of the first solid matter.