Single-Pad Current Measurement Architecture for On- and Off-Current Testing
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Solution Overview
Problem
Conventional process circuitry requires multiple pads for each device to measure on-current and off-current, leading to inefficiency and a significant silicon area usage due to the need for numerous measurements.
Innovation Solution
A current measurement architecture that allows for on-current and off-current measurements using a single pad by arranging transistors in parallel branches, enabling separate activation and deactivation of transistors to measure individual device currents efficiently.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If multiple pads are used for each device to measure on-current and off-current, then measurement capability is improved, but silicon area consumption increases significantly
Solution Approach 1:
The patent combines multiple measurement functions (on-current measurement and off-current measurement) into a single pad. By using control signals to selectively activate different transistor configurations, the single pad serves multiple measurement purposes that traditionally required separate pads, thereby reducing silicon area while maintaining full measurement capability
Solution Approach 2:
The single pad is designed to perform multiple functions: measuring on-current when the transistor is activated and measuring off-current when the transistor is deactivated. This multi-functional design allows one pad to replace what would traditionally require multiple dedicated pads, solving the area efficiency problem
2Measurement precision
If multiple pads are used for each device, then individual current measurement is enabled, but device complexity increases
Solution Approach 1:
The patent employs dynamic control signals to switch between different measurement modes (on-current and off-current) using the same pad. This dynamic switching capability allows the circuit to adapt its configuration based on the measurement requirement, maintaining individual device measurement capability while reducing the static structural complexity compared to having multiple dedicated pads
3Measurement precision
If multiple pads are used for measurements, then measurement accuracy is improved, but manufacturing efficiency decreases
Solution Approach 1:
The patent uses periodic activation and deactivation of transistors through control signals to enable sequential measurement of on-current and off-current on the same pad. This periodic switching allows the measurement system to efficiently cycle through different measurement types without requiring multiple pads, thereby improving manufacturing productivity while maintaining measurement accuracy
Data Source
AI summary
Various implementations described herein are related to a device with fabrication test circuitry having transistors arranged in a parallel branch configuration between a supply voltage and a single pad. In some applications, each transistor in an off-current branch may be separately deactivated so as to test leakage current applied to the pad by way of the off-current branch, and also, each transistor in an on-current branch may be deactivated so as to further test the leakage current applied to the pad by way of the off-current branch.