Single Robot Controller for Substrate Transfer Coordination
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Solution Overview
Problem
Conventional substrate processing apparatuses have inefficiencies in wafer transfer control systems, leading to increased computational load on robot controllers and higher operational costs, which hinder throughput and productivity.
Innovation Solution
A substrate processing apparatus with a control system that integrates drive control of multiple motors, including those for transfer, elevator, and open-close devices, using a single robot controller to reduce communication time and enable simultaneous operations, thereby decreasing the load on the master controller and enhancing throughput.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If multiple separate controllers are used for transfer device, open-close device, and elevator device, then each device can be controlled independently, but communication time increases and operational costs increase
Solution Approach 1:
The patent consolidates control of the transfer device, open-close device, and elevator device under a single robot controller. This merging of control functions eliminates the need for multiple separate controllers and reduces communication overhead between controllers, directly addressing the contradiction by maintaining independent device control capability while reducing communication time.
Solution Approach 2:
The robot controller is designed to perform multiple control functions simultaneously - controlling the transfer device, open-close device, and elevator device. This multi-functionality allows a single controller to manage all substrate transfer operations, reducing the number of controllers needed and minimizing communication time while preserving independent control capability for each device.
2Ease of operation
If multiple separate controllers are used for transfer device, open-close device, and elevator device, then each device can be controlled independently, but operational costs increase
Solution Approach 1:
The patent merges the control functions of multiple devices into a single robot controller, reducing the total number of controllers from three or more to one. This consolidation simplifies the control system architecture, reduces operational costs associated with maintaining multiple controllers, and maintains the capability for independent device control through software configuration.
Solution Approach 2:
The robot controller is designed as a universal controller capable of managing multiple different devices (transfer device, open-close device, elevator device). This multi-functional design reduces the need for specialized controllers for each device, thereby reducing device complexity and operational costs while preserving independent control capability.
3Productivity
If transfer robot speed is increased to improve throughput, then substrate transfer efficiency increases, but safety and security of wafer transfer may be compromised
Solution Approach 1:
The integrated control system performs preliminary coordination of all devices involved in substrate transfer. By pre-synchronizing the transfer device, open-close device, and elevator device operations, the system ensures smooth, coordinated movement that maintains safety while improving throughput. This eliminates the need to increase robot speed to achieve better throughput.
Solution Approach 2:
The robot controller implements feedback mechanisms to monitor the status and position of all controlled devices in real-time. This feedback enables dynamic adjustment of operations to maintain safe wafer transfer while optimizing throughput. The system can detect and respond to conditions that might compromise safety without requiring increased transfer speeds.
Data Source
AI summary
A substrate processing apparatus for processing a substrate includes a transfer device which has a drive motor and transfers a substrate, a peripheral device which has a drive motor and loads and unloads the substrate in substrate-transfer operation of the transfer device, and a control device which conducts drive control on the drive motor of the transfer device and drive control of the drive motor of the peripheral device.