Spatial Light Modulator Beam Splitting for Uniform Nanoimprint Curing
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Solution Overview
Problem
Nanoimprint lithography systems face challenges in achieving precise control over the spatio-temporal distribution of actinic radiation during the curing process, particularly due to inter-element variations in intensity between beamlets from spatial light modulators, which can lead to unwanted artifacts in the cured film.
Innovation Solution
The system employs a spatial light modulator with individually controllable modulation elements to transform radiation into beamlets, and uses a combination of beam splitters and combiners to create offset images that compensate for these variations, ensuring precise control over the actinic radiation distribution at the plane of the formable material.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a single spatial light modulator is used to illuminate formable material, then the curing process can be performed, but inter-element variations in intensity between beamlets cause unwanted artifacts in the cured film
Solution Approach 1:
The patent divides the single spatial light modulator image into multiple offset images (first image and second image) that are projected at different positions. By segmenting the illumination into multiple overlapping images with different offsets, the system compensates for inter-element variations and achieves more uniform curing across the formable material, thereby reducing artifacts in the cured film.
Solution Approach 2:
The patent combines multiple offset images (first image and second image) from the spatial light modulator into a composite illumination pattern. By merging these offset images with proper positioning, the system creates a unified illumination field that averages out intensity variations, improving uniformity and reducing artifacts in the cured film.
2Manufacturing precision
If multiple offset images from spatial light modulator are used, then uniformity of cured film is improved, but device complexity increases due to additional beam splitters and combiners
Solution Approach 1:
The optical system is segmented into separate functional modules: beam splitters that divide the single spatial light modulator output into multiple paths, and beam combiners that merge the offset images. This modular segmentation allows for better control and adjustment of each component, achieving improved uniformity while managing complexity through organized modularity.
Solution Approach 2:
Beam splitters and beam combiners act as intermediary optical elements that facilitate the creation and merging of offset images. These intermediaries enable the system to achieve uniform illumination by properly positioning and combining multiple images, while their standardized functions help manage overall system complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for improved uniformity and reduced artifacts in the cured film, enhancing the ability to inspect defects and maintain pattern transfer quality in subsequent processing steps.
Implementation Method 1
a spatial light modulator with individually controllable modulation elements to transform radiation into beamlets
Implementation Method 2
a beam splitter configured to receive actinic radiation from the spatial light modulator and emit a first image of the spatial light modulator and a second image of the spatial light modulator
Implementation Method 3
a beam combiner configured to receive the first image and the second image and emit a combined image. The combined image may include the first image; and the second image is offset from the first image
Implementation Method 4
a projection system configured to receive the combined image and illuminate formable material between a template and a substrate with a projected image at a plane of the formable material
Data Source
AI summary
A shaping system and method of shaping with the shaping system. The shaping system may include a spatial light modulator. The shaping system may include a radiation source to illuminate the spatial light modulator with actinic radiation. The shaping system may include a beam splitter configured to receive actinic radiation from the spatial light modulator and emit a first image of the spatial light modulator and a second image of the spatial light modulator. The shaping system may include a beam combiner configured to receive the first image and the second image and emit a combined image. The combined image may include the first image; and the second image offset from the first image. The shaping system may include a projection system configured to receive the combined image and illuminate formable material between a template and a substrate with a projected image at a plane of the formable material.