Slotted Waveguide Photodetector Layout for Bandwidth and Responsivity

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Solution Overview

Problem

Existing photonics chips face a trade-off between improving photodetector bandwidth and responsivity, with design modifications typically reducing one while enhancing the other.

Innovation Solution

A photodetector structure with a waveguiding structure comprising a first and second waveguide core, a slot between them, and waveguide core segments adjoined to a semiconductor layer, which enhances light transfer efficiency and maintains performance metrics without altering the semiconductor layer's shape or size.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Speed

If design modifications are made to improve the bandwidth of a photodetector, then the bandwidth is improved, but the responsivity is reduced

Engineering Contradiction:
ImprovebandwidthVSAvoidresponsivity
Core Design Contradiction:
SpeedVSReliability

Solution Approach 1:

The waveguide core is divided into multiple discrete segments positioned within the photodetector's active region. These segmented waveguide cores create multiple light propagation paths that interact with the semiconductor layer, enabling enhanced light absorption and improved responsivity while maintaining the bandwidth performance through the segmented structure's optical path management

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The waveguide cores are positioned in a lateral dimension within the photodetector structure, extending into the active region from the input surface. This dimensional arrangement allows light to be guided through multiple zones of the semiconductor layer, increasing the interaction length and absorption efficiency without compromising the temporal response characteristics

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Area of moving object

If the footprint of a photodetector is reduced, then the area is reduced, but the performance metrics such as responsivity and bandwidth may be compromised

Engineering Contradiction:
ImprovefootprintVSAvoidperformance metrics
Core Design Contradiction:
Area of moving objectVSReliability

Solution Approach 1:

The waveguide cores are strategically positioned within specific regions of the photodetector's active region, concentrating the optical field where it can most effectively interact with the semiconductor layer. This localized light guidance maximizes the use of available space, achieving high responsivity and bandwidth within a compact footprint by optimizing the light-matter interaction in critical zones

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

Multiple waveguide core segments are nested within the photodetector's active region, with each segment contributing to light absorption in different zones. This nested arrangement allows multiple functional elements to be packed into a small area, maintaining high performance metrics while minimizing the overall device footprint

Inventive Principle:
Principle #7Nested doll (Nesting)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The waveguiding structure improves responsivity, coupling efficiency, and bandwidth of the photodetector while reducing its footprint, maintaining satisfactory performance without modifying the semiconductor layer's dimensions.

Implementation Method 1

a waveguiding structure including a first waveguide core, a second waveguide core, a slot between the first waveguide core and the second waveguide core

Methodology Applied
Scientific EffectWaveguide: Waveguide (optics)

Implementation Method 2

A photodetector may be employed in the photonic integrated circuit to convert light, which may be modulated as an optical signal, into an electrical signal

Methodology Applied
Scientific EffectPhotoelectric Effect: Photoelectric Effect

Data Source

PatentUS12625320B2Photodetectors with an adjoined slotted waveguiding structure
Publication Date: 2026.05.12 GLOBALFOUNDRIES US INC
  • US12625320B2 patent drawing
  • US12625320B2 patent drawing
  • US12625320B2 patent drawing

AI summary

Structures for a photonics chip that include a photodetector and methods of forming such structures. The structure comprises a photodetector including a pad and a semiconductor layer on the pad. The structure further comprises a waveguiding structure including a first waveguide core, a second waveguide core, a slot between the first waveguide core and the second waveguide core, and a plurality of waveguide core segments. The waveguiding structure is adjoined to a side edge of the pad adjacent to the semiconductor layer. Each of the plurality of waveguide core segments includes a portion that is disposed in the slot.