Shape Memory Alloy Faceplate for Adjustable Showerhead Nozzles
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Solution Overview
Problem
Conventional processing chambers with fixed nozzle diameters in showerheads require multiple faceplate designs for different process operations, leading to increased manufacturing costs and reduced throughput due to downtime for faceplate replacements.
Innovation Solution
A faceplate with poppet assemblies that can vary the nozzle cross-sections by moving poppets within the holes, allowing for adjustable gas flow areas controlled by electrical power, enabling a single faceplate to be used for multiple processes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If multiple faceplate designs are used to achieve different nozzle diameters for different process operations, then the desired layer geometries can be achieved, but the downtime for faceplate replacement increases and throughput decreases
Solution Approach 1:
The patent applies dynamics by making the nozzle diameter adjustable rather than fixed. Poppet assemblies with movable poppets are positioned within the faceplate holes, allowing the effective nozzle diameter to be dynamically changed during operation. This enables a single faceplate to adapt to different process requirements without physical replacement, thereby maintaining productivity while achieving versatility.
Solution Approach 2:
The patent implements universality by designing a single faceplate that can perform multiple functions through adjustable nozzle diameters. The poppet assemblies allow the same faceplate to be used for different process operations requiring different gas flow patterns, eliminating the need for multiple specialized faceplates and reducing replacement downtime.
2Adaptability or versatility
If multiple faceplate designs are used to achieve different nozzle diameters, then different process operations can be supported, but the manufacturing cost increases
Solution Approach 1:
The patent reduces manufacturing costs by replacing multiple specialized faceplates with a single universal faceplate design. The poppet assemblies enable one faceplate to serve multiple process operations, reducing the total number of faceplates that need to be manufactured, stored, and maintained, thereby lowering overall manufacturing costs while maintaining process operation compatibility.
Solution Approach 2:
The patent merges the functionality of multiple faceplates into a single integrated design. By combining various nozzle diameter configurations into one faceplate with adjustable poppets, the system consolidates what would otherwise require separate manufactured components, reducing manufacturing complexity and cost.
3Device complexity
If fixed nozzle diameters are used in showerheads, then the showerhead structure remains simple, but the ability to vary gas flow areas is limited
Solution Approach 1:
The patent introduces dynamic adjustability to the faceplate structure through poppet assemblies. Each poppet can be independently positioned within its hole, allowing the gas flow area to be varied dynamically. This dynamic element adds complexity but enables the gas flow area adjustment capability that fixed structures cannot provide.
Solution Approach 2:
The patent segments the faceplate into multiple independent poppet assemblies, each controlling a specific hole's gas flow area. This segmentation allows individual adjustment of each nozzle without affecting others, providing fine-grained control over gas flow patterns while maintaining a relatively simple overall structure based on repetitive modular units.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The ability to adjust the gas flow area dynamically reduces the need for multiple faceplates, lowering manufacturing costs and increasing processing throughput by eliminating downtime for faceplate changes, while ensuring uniform deposition across substrates.
Implementation Method 1
a first spring connected to the poppet and operable to move the poppet in a first direction when connected to an electrical power, and a second spring connected to the poppet and operable to move the poppet in a second direction that is opposite the first direction when the electrical power is reduced or terminated
Data Source
AI summary
Embodiments of the present disclosure relate to a faceplate that implements poppets to vary nozzle cross-sections. In one embodiment, a faceplate is provided. The faceplate includes a body, a plurality of holes in the body, and a plurality of poppet assemblies. The poppet assemblies include a poppet configured to travel in a first portion of the hole and create a variable passage in a second portion of the hole. The poppet assemblies further include a first spring connected to the poppet and operable to move the poppet in a first direction when connected to an electrical power, and a second spring connected to the poppet and operable to move the poppet in a second direction that is opposite the first direction when the electrical power is reduced or terminated.