Solid Blowing Agent Classifier with Magnetic Filter
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Solution Overview
Problem
In semiconductor manufacturing processes, solid blowing agents used in chemical mechanical polishing often contain metallic impurities that affect the quality of the polishing layer, and existing methods fail to effectively classify and purify these agents to remove such impurities.
Innovation Solution
A classifying and purifying apparatus that includes a classifier to separate solid blowing agents into microspheres and a magnetic filter to remove metallic substances, utilizing a vortex generating material and vibration to enhance classification efficiency, and a storage system to manage the purified microspheres, ensuring a moisture content of 3 wt % or less.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If solid blowing agents are used in chemical mechanical polishing, then pore formation in polishing layer is achieved, but metallic impurities affect the quality of the polishing layer
Solution Approach 1:
The patent applies extraction by removing metallic impurities from solid blowing agents through a magnetic separation system. A magnetic filter with magnet attracts and separates metallic particles from the blowing agent microspheres, extracting the harmful impurities before the blowing agents are used in polishing pad manufacturing, thereby preventing quality issues in the final polishing layer
Solution Approach 2:
The patent implements preliminary action by classifying and purifying solid blowing agents before they are incorporated into polishing pads. The system performs size classification and magnetic separation in advance, ensuring that only clean, appropriately-sized microspheres are used in manufacturing, preventing impurity-related defects before they occur
2Object-affected harmful factors
If classification and purification processes are implemented, then metallic impurities are removed, but process complexity increases
Solution Approach 1:
The patent applies multi-functionality by designing an integrated system where a single apparatus performs both classification and purification functions. The classifier separates microspheres by size while the magnetic filter simultaneously removes metallic impurities, allowing one system to address multiple quality issues without requiring separate processing stages for each function
Solution Approach 2:
The patent merges classification and purification operations into a unified processing flow. The solid blowing agents undergo size classification and magnetic separation in sequence within one integrated system, combining what could be separate complex processes into a streamlined operation that reduces overall system complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus effectively classifies and purifies solid blowing agents, reducing metallic impurities and moisture content, thereby improving the quality of the polishing layer and reducing defects in semiconductor wafers.
Implementation Method 1
a filter material arranged in the filter space and generating magnetic force. The metallic substance may be attached to the filter material by the magnetic force
Implementation Method 2
utilizing a vortex generating material and vibration to enhance classification efficiency
Data Source
AI summary
A classifying and purifying apparatus of a solid blowing agent includes a classifier which classifies a supplied solid blowing agent into first microspheres and second microspheres, a storage connected to the classifier, in which the classified first microspheres flow in to be stored and emitted, and a filter arranged on the moving route of the solid blowing agent or the first microspheres which separates metallic substance from the object of filtering comprising the solid blowing agent or the first microspheres.