Solid Memory Superlattice Structure for Phase-Change RAM

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Solution Overview

Problem

The structural analysis of chalcogen compounds, particularly GeSbTe, has been hindered by the difficulty in distinguishing Te from Sb using X-ray and electron diffraction due to similar atomic numbers and electron counts, leading to unclear crystalline structures and variations in electric resistance in phase-change RAMs, which affects data recording and rewriting efficiency.

Innovation Solution

A superlattice structure is formed by combining Sb and Sb2Te3 layers via weak atomic bonds, allowing for controlled interlaminar separation and switching, reducing interfacial electric resistance and increasing the number of rewriting cycles by stabilizing the switching motion and minimizing energy wastage as heat.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If a single-layered alloy thin film is used as recording material, then the manufacturing process is simple, but the uniformity of electric resistance values deteriorates due to differences in interfacial electric resistance between individual microcrystals

Engineering Contradiction:
Improvemanufacturing process simplicityVSAvoiduniformity of electric resistance values
Core Design Contradiction:
Ease of manufactureVSManufacturing precision

Solution Approach 1:

The single-layered alloy thin film is divided into multiple sub-layers with different compositions (Ge-Sb-Te layer and Ge-Te layer). This segmentation allows each sub-layer to contribute differently to the overall properties, reducing variations in interfacial electric resistance between microcrystals while maintaining manufacturability through sequential deposition processes.

Inventive Principle:
Principle #1Segmentation

2Reliability

If phase-transition between crystalline and amorphous states is used for recording, then data storage function is achieved, but the number of rewriting cycles is limited due to volume change causing stress and deformation

Engineering Contradiction:
Improvedata storage functionVSAvoidnumber of rewriting cycles
Core Design Contradiction:
ReliabilityVSDuration of action of stationary object

Solution Approach 1:

The invention introduces compositional parameters (adding Ge and Te elements in specific ratios) and structural parameters (controlling crystalline phase distribution) to modify the phase-transition characteristics. These parameter changes reduce the volume change during phase-transition, thereby decreasing stress and deformation accumulation, which extends the number of rewriting cycles while preserving data storage functionality.

Inventive Principle:
Principle #35Parameter changes

3Reliability

If Te and Sb atoms are present in the compound, then the desired phase-change characteristics are achieved, but structural analysis becomes difficult due to similarity in atomic numbers and electron counts

Engineering Contradiction:
Improvephase-change characteristicsVSAvoidstructural analysis difficulty
Core Design Contradiction:
ReliabilityVSDifficulty of detecting and measuring

Solution Approach 1:

The invention uses Ge atoms as an intermediary element that provides sufficient contrast in atomic number and electron count compared to both Te and Sb atoms. This intermediary presence enables X-ray and electron diffraction methods to distinguish the positions of Te and Sb atoms more effectively, facilitating structural analysis while maintaining the desired phase-change characteristics through the Ge-Sb-Te compound system.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach significantly improves the characteristics of phase-change RAMs by reducing interfacial electric resistance and increasing the number of rewriting cycles, achieving high-speed and efficient data recording and erasing with improved energy efficiency.

Implementation Method 1

phase-separation solid memory for recording and erasing, as data, a difference in electric resistance or optical characteristics which is caused by phase-separation (spindle separation) of a chalcogen compound which is a form of phase-change

Methodology Applied
Scientific EffectPhase separation: Phase Change

Implementation Method 2

Recording and erasing of data in phase-change RAM have hitherto been performed based on a change in physical characteristics caused by primary phase-transformation between a crystalline state and an amorphous state of a chalcogen compound

Methodology Applied
Scientific EffectPhase transformation: Phase Change

Data Source

PatentUS9224460B2Solid memory
Publication Date: 2015.12.29 NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE & TECHNOLOGY
  • US9224460B2 patent drawing
  • US9224460B2 patent drawing
  • US9224460B2 patent drawing

AI summary

Recording and erasing of data in PRAM have hitherto been performed based on a change in physical characteristics caused by primary phase-transformation of a crystalline state and an amorphous state of a chalcogen compound including Te which serves as a recording material. Since, however, a recording thin film is formed of a polycrystal but not a single crystal, a variation in resistance values occurs and a change in volume caused upon phase-transition has placed a limit on the number of times of readout of the record. In one embodiment, the above problem is solved by preparing a solid memory having a superlattice structure with a thin film containing Sb and a thin film containing Te. The solid memory can realize the number of times of repeated recording and erasing of 1015.