SPAD Prism Package Layout for High-Aspect-Ratio Line Arrays

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Solution Overview

Problem

Conventional image sensors suffer from limited functionality, including inability to determine object distance and lower than desired image quality and resolution, which is addressed by incorporating single-photon avalanche diodes (SPADs) for enhanced light detection and depth sensing.

Innovation Solution

The implementation of SPADs in imaging systems, which include passive and active quenching circuitry to detect single photons and measure photon time-of-flight for 3D imaging, along with silicon photomultipliers to increase dynamic range and resolution by grouping SPADs in arrays and using prisms to redirect light across multiple silicon dice for high aspect ratio arrays.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If single-photon avalanche diodes (SPADs) are used for single photon detection, then sensitivity to incident light is improved, but device complexity increases due to required quenching circuitry and specialized packaging

Engineering Contradiction:
Improvesensitivity to incident lightVSAvoiddevice complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

Multiple silicon dice containing SPAD arrays are integrated onto a single substrate and packaged together with inter-die optical coupling, combining multiple sensing elements into a unified device that achieves high sensitivity while distributing complexity across modular components

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

Optical coupling elements such as lenses or microlens arrays are introduced as intermediaries between the SPAD arrays and incident light, enabling efficient photon detection without requiring complex direct coupling structures, thus maintaining sensitivity while simplifying the overall device architecture

Inventive Principle:
Principle #24Intermediary (Mediator)

2Measurement precision

If high aspect ratio silicon photomultiplier arrays are implemented, then dynamic range and resolution are improved, but manufacturing difficulty increases due to fragility and alignment challenges

Engineering Contradiction:
Improvedynamic range and resolutionVSAvoidmanufacturing feasibility
Core Design Contradiction:
Measurement precisionVSEase of manufacture

Solution Approach 1:

The silicon photomultiplier array is divided into multiple smaller silicon dice with lower individual aspect ratios, which are then assembled in a multi-die package. This segmentation reduces the fragility and manufacturing difficulty of each individual die while maintaining the overall high aspect ratio and performance of the complete array through precise inter-die optical coupling

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The system transitions from a single-plane high aspect ratio array to a three-dimensional multi-die stacked configuration, where multiple lower-aspect-ratio dice are arranged in layers with optical coupling between dies. This dimensional change enables manufacturing of individual dice while achieving the desired overall array geometry and performance

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Ease of manufacture

If multiple silicon dice are used to form high aspect ratio arrays, then manufacturing feasibility is improved, but device complexity increases due to staggered arrangement and inter-die coupling requirements

Engineering Contradiction:
Improvemanufacturing feasibilityVSAvoiddevice complexity
Core Design Contradiction:
Ease of manufactureVSDevice complexity

Solution Approach 1:

Multiple silicon dice are merged onto a single substrate with their respective SPAD arrays optically coupled to shared optical elements or light paths. This merging approach distributes the manufacturing complexity across standard-sized dice while achieving the functional equivalent of a high aspect ratio array through the combined structure

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The package substrate and optical coupling elements are designed to serve multiple functions simultaneously: mechanical support for multiple dice, optical alignment reference, and light routing between dies and external sources. This multi-functionality reduces the number of separate components needed, thereby reducing overall device complexity despite the multi-die configuration

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution enables improved sensitivity in low light conditions, increased dynamic range, and higher resolution imaging by effectively detecting single photons and measuring photon time-of-flight, while maintaining manufacturing feasibility through the use of multiple lower-aspect-ratio silicon dice and light redirecting prisms.

Implementation Method 1

Each pixel typically includes a photosensitive element (such as a photodiode) that receives incident photons (light) and converts the photons into electrical signals

Methodology Applied
Scientific EffectPhotoelectric effect: Photoelectric Effect

Implementation Method 2

using prisms to redirect light across multiple silicon dice for high aspect ratio arrays

Methodology Applied
Scientific EffectRefraction: Refraction

Implementation Method 3

measure photon time-of-flight for 3D imaging

Methodology Applied
Scientific EffectTime of flight: Time of Flight

Data Source

PatentUS11870000B2Semiconductor packages with single-photon avalanche diodes and prisms
Publication Date: 2024.01.09 SEMICON COMPONENTS IND LLC
  • US11870000B2 patent drawing
  • US11870000B2 patent drawing
  • US11870000B2 patent drawing

AI summary

A semiconductor package may include a line array of single-photon avalanche diodes (SPADs). The line array of single-photon avalanche diodes may be split between multiple silicon dice. The silicon dice may have a staggered arrangement, with prisms on the package lid redirecting incident light to the silicon dice. The silicon dice may alternate between a first side of the package substrate and a second side of the package substrate. The prisms may alternate between a first structure that redirects incident light to the first side of the package substrate and a second structure that redirects incident light to the second side of the package substrate. The silicon dice may overlap to allow satisfactory alignment between the silicon dice and the prisms.