Spinning Probing Beam Surface Characterization
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Characterization methods using electromagnetic radiation face challenges in achieving high throughput and precision while maintaining compact and cost-effective systems, particularly for large or heavy objects, due to the need for fast spinning and large equipment sizes, which can lead to vibrations and accuracy issues.
Innovation Solution
A method and apparatus utilizing dual concurrent motions, where a spinning probing beam scans an object surface along a small orbit with high speed, combined with slow linear or rotational movement of the object perpendicular to the spinning axis, allowing for high precision and throughput without the need for fast object spinning, and enabling compact, inexpensive characterization tools.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the probing beam is made narrower to achieve higher spatial resolution, then measurement precision is improved, but scanning time increases proportionally, reducing productivity
Solution Approach 1:
The patent implements dynamic scanning by spinning the probing beam at high speed in a circular or spiral pattern across the object surface. This dynamic approach allows the narrow beam to cover a larger area over time, achieving high spatial resolution while maintaining high scanning throughput through continuous motion rather than static measurement
Solution Approach 2:
The probing beam performs periodic scanning motions (circular or spiral patterns) across the object surface. By repeatedly sweeping the beam through the same or adjacent areas in a periodic manner, the system accumulates data points that build up high-resolution parametric maps while the periodic nature enables efficient time-multiplexed measurement of multiple locations
2Productivity
If traditional high-speed scanning methods are used to achieve high throughput, then productivity is improved, but equipment size increases and vibrations occur, worsening device complexity and reliability
Solution Approach 1:
The patent replaces the need for large-scale mechanical scanning systems with a compact beam-spinning mechanism. Instead of moving heavy stages or large optical assemblies, the system uses a relatively simple spinning mechanism to direct the probing beam in circular or spiral patterns, achieving high throughput with minimal mechanical complexity and reduced equipment footprint
Solution Approach 2:
The patent transitions from linear one-dimensional scanning to two-dimensional circular or spiral scanning patterns. By utilizing rotational motion and angular positioning, the system achieves comprehensive surface coverage and high throughput through multi-dimensional beam traversal, enabling efficient characterization without requiring large linear travel distances
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables high-speed surface scanning with high precision and throughput for objects of arbitrary shapes and sizes, reducing equipment size and cost, and allowing for in-situ characterization without the limitations of fast spinning, thus improving the efficiency and practicality of characterization processes.
Implementation Method 1
a primary electromagnetic radiation is directed towards characterized objects so that it interacts with surfaces and materials of the objects resulting in responses which are called in the present invention as 'secondary radiation'. The secondary radiation may include a remnant, reflected, refracted, transmitted and scattered portions of the primary radiation
Implementation Method 2
a spinning probing beam is provided that scans an object surface along a small orbit with high speed
Implementation Method 3
combined with slow linear or rotational movement of the object perpendicular to the spinning axis
Implementation Method 4
combined with slow linear or rotational movement of the object perpendicular to the spinning axis
Data Source
AI summary
A high throughput and high resolution method for characterizing objects is based on scanning their surfaces with a fast spinning probing beam of electromagnetic radiation concurrently with relatively slow object motion. A characterization apparatus comprises a guiding system that directs a primary beam of electromagnetic radiation onto the surface of a characterized object. An actuator repositions the object. An analytical system measures characteristic parameters of secondary electromagnetic radiation instigated by the primary beam of electromagnetic radiation from the object. A register system records the measured characteristic parameters synchronously with instantaneous coordinates of beam spots at which the secondary electromagnetic radiation is instigated. A compact system of probing beam spinning enables fabrication of inexpensive characterization tools with small dimensions. The tools may be conveniently integrated into production or processing equipment to provide an in-situ or in-process characterization.