Spiral Choke Filter Circuit for Compact RF Power Cutoff
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Solution Overview
Problem
Existing plasma processing apparatuses face challenges in implementing a simple and compact radio-frequency filter due to the complex structure and large dimensions of conventional radio-frequency filters, which affect the power feeding line leading to the electrostatic chuck and heater.
Innovation Solution
A filter circuit is designed with a housing, a protrusion portion, and a power feeding line that includes an antenna formed in a spiral shape coaxially with the protrusion, forming a choke structure to insulate the power feeding line from the housing, allowing for a compact and efficient radio-frequency filter.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a conventional radio-frequency filter is used, then radio-frequency power can be cut off, but the filter structure becomes complex and large in dimensions
Solution Approach 1:
The patent combines the housing, protrusion portion, and power feeding line with antenna into a single integrated filter circuit structure. The housing forms the outer conductor, the protrusion portion creates a choke structure with the antenna, and the power feeding line is insulated within the housing, merging multiple components into one compact unit that cuts off radio-frequency power without requiring separate filter elements
Solution Approach 2:
The power feeding line is nested inside the housing, with the antenna formed inside the housing and the protrusion portion extending into the housing space. The inner conductor of the power feeding line is surrounded by the antenna, which is in turn surrounded by the housing, creating a nested configuration that achieves compact dimensions while maintaining filter functionality
2Reliability
If a conventional radio-frequency filter is used, then radio-frequency power can be cut off, but the filter dimensions become large
Solution Approach 1:
The patent combines the housing, protrusion portion, and power feeding line with antenna into a single integrated filter circuit structure. The housing forms the outer conductor, the protrusion portion creates a choke structure with the antenna, and the power feeding line is insulated within the housing, merging multiple components into one compact unit that cuts off radio-frequency power without requiring separate filter elements
Solution Approach 2:
The power feeding line is nested inside the housing, with the antenna formed inside the housing and the protrusion portion extending into the housing space. The inner conductor of the power feeding line is surrounded by the antenna, which is in turn surrounded by the housing, creating a nested configuration that achieves compact dimensions while maintaining filter functionality
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The filter circuit effectively cuts off radio-frequency power, enabling a simple and compact design suitable for high-output radio-frequency power applications while preventing ground faults, and can adjust to cut off variable and broadband frequencies.
Implementation Method 1
the protrusion portion and the antenna form a choke structure
Data Source
AI summary
A filter circuit includes: a housing formed of a conductor and provided with input and output ports that each includes outer and inner conductors, the housing being kept at a ground potential together with the outer conductors of the input and output ports; a protrusion portion formed of a conductor, connected to the housing, and configured to protrude in a spiral shape inside the housing; and a power feeding line provided inside the housing and configured to be insulated from the housing. The power feeding line includes an input-side conductor which is the inner conductor of the input port, an output-side conductor which is the inner conductor of the output port, and an antenna connected to the input-side conductor and the output-side conductor and formed in a spiral shape coaxially with the protrusion portion. The protrusion portion and the antenna form a choke structure.