Scanning Probe Microscope Adaptive Initial Positioning

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Solution Overview

Problem

Scanning probe microscopes face challenges in accurately measuring force curves when the sample surface is inclined, has large unevenness, or experiences thermal drift, leading to issues with probe tip adherence, deflection, and incomplete data collection.

Innovation Solution

A scanning probe microscope with a position change unit, deflection amount measurement unit, Z direction movement distance detection unit, and initial position change unit that adjusts the initial position based on movement distance limits to maintain optimal probe-sample interaction, preventing adherence and ensuring complete data collection.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If the initial position of the fixed end is set close to the sample surface to ensure sufficient deflection range, then the deflection amount can reach predetermined values, but the probe tip may adhere to the sample surface and cannot return to initial position

Engineering Contradiction:
Improvedeflection amount measurementVSAvoidprobe tip adherence
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

The system dynamically adjusts the initial position of the fixed end based on real-time detection of probe tip adherence. The position change unit modifies the initial position from a first position (closer to sample) to a second position (farther from sample) when adherence is detected, making the system adaptive rather than static

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The controller detects whether the probe tip has adhered to the sample surface by monitoring whether the fixed end returns to its initial position after moving away. This feedback mechanism triggers automatic position adjustment to prevent adherence, ensuring reliable measurements

Inventive Principle:
Principle #23Feedback

2Reliability

If the initial position of the fixed end is set far from the sample surface to prevent adherence, then the probe tip can return to initial position, but the deflection amount cannot reach predetermined values

Engineering Contradiction:
Improveprobe tip return to initial positionVSAvoiddeflection amount measurement
Core Design Contradiction:
ReliabilityVSMeasurement precision

Solution Approach 1:

The system dynamically adjusts the initial position based on adherence detection. When the probe tip successfully returns to the initial position (indicating no adherence), the system can maintain or revert to the first position closer to the sample, optimizing deflection measurement capability

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The system changes the position parameter of the fixed end between two states (first position and second position) based on measurement conditions. This parameter adjustment ensures both adequate deflection range and reliable probe tip return

Inventive Principle:
Principle #35Parameter changes

3Measurement precision

If manual adjustment of initial position is used for inclined or uneven sample surfaces, then measurement can be performed, but measurement time increases and productivity decreases

Engineering Contradiction:
Improveforce curve measurement accuracyVSAvoidmeasurement speed
Core Design Contradiction:
Measurement precisionVSProductivity

Solution Approach 1:

The system performs self-adjustment of the initial position automatically without requiring manual intervention. The controller detects adherence conditions and triggers position changes autonomously, enabling the system to adapt to inclined or uneven sample surfaces independently

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The position change unit pre-adjusts the initial position to appropriate levels based on detected adherence conditions, preventing measurement failures before they occur and eliminating the need for repeated manual adjustments

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables accurate force curve measurement even with inclined or uneven sample surfaces and during thermal drift, by adjusting the initial position to maintain appropriate probe-sample interaction and prevent incomplete data collection.

Implementation Method 1

a laser light source 95 that irradiates the movable end 921 of the cantilever 92 with laser light and a light receiver 96 that detects laser light reflected by the movable end 921

Methodology Applied
Scientific EffectLight reflection: Reflection

Implementation Method 2

The sample stage 94 is moved in the Z direction by a piezoelectric element

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Implementation Method 3

an atomic force microscope (AFM) detects an interatomic force generated between an atom at the probe tip and an atom on the sample surface

Methodology Applied
Scientific EffectInteratomic force: Van der Waals Force

Data Source

PatentUS10802044B2Scanning probe microscope
Publication Date: 2020.10.13 SHIMADZU CORP
  • US10802044B2 patent drawing
  • US10802044B2 patent drawing
  • US10802044B2 patent drawing

AI summary

A scanning probe microscope includes a position change unit that relatively changes positions of a fixed end of a cantilever and a surface of a sample S in a Z direction, a deflection amount measurement unit that measures a deflection amount of the cantilever, a Z direction movement distance detector that detects a movement distance in the Z direction while the fixed end is relatively moved with respect to the surface of the sample S from a predetermined initial position until a tip of a probe comes into contact with the surface of the sample S and the deflection amount becomes a predetermined value, and an initial position change unit that changes the initial position to a position further away from the surface of the sample S when the movement distance is below a predetermined lower limit.