Scanning Probe Microscope High-Speed Force Control
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Solution Overview
Problem
Current scanning probe microscopes face limitations in peak force tapping frequency and scanning range, with existing methods either increasing frequency at the cost of reduced range or vice versa.
Innovation Solution
A scanning method and device for a scanning probe microscope based on high-speed instantaneous force control, which involves acquiring and processing acting force signals to generate a target acting force signal, allowing for high-frequency peak force tapping while maintaining a sufficient scanning range.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If peak force tapping frequency is increased to achieve high scanning speed, then scanning speed is improved, but scanning range is reduced
Solution Approach 1:
The patent implements dynamic adjustment of the driving signal frequency based on the scanning position and real-time force feedback. The control system dynamically modifies the peak force tapping frequency during scanning to optimize both scanning speed and range, resolving the contradiction between these two parameters through adaptive control rather than fixed frequency operation.
Solution Approach 2:
The patent changes the operating parameters of the piezoelectric driver by adjusting the drive frequency and voltage amplitude in real-time. By dynamically changing these parameters based on feedback from the force sensor and position information, the system achieves high scanning speed over extended ranges without the fixed parameter limitations of traditional methods.
2Productivity
If photothermal effect driving is used to achieve high peak force tapping frequency, then frequency is improved, but scanning range is reduced
Solution Approach 1:
The patent replaces the photothermal effect driving mechanism with a direct piezoelectric actuation system. This substitution allows for more efficient and controllable mechanical actuation of the probe, enabling high-frequency tapping while maintaining extended scanning range through superior mechanical coupling and direct force application.
Solution Approach 2:
The patent incorporates real-time feedback from force sensors and position detectors to continuously adjust the driving parameters. This closed-loop control system monitors the actual probe-sample interaction and dynamically adjusts the piezoelectric drive signals to maintain optimal frequency and amplitude, achieving both high frequency and extended range simultaneously.
3Area of stationary object
If traditional peak force tapping mode is used, then scanning range is maintained, but peak force tapping frequency is limited
Solution Approach 1:
The patent employs periodic oscillation of the probe at high frequency during scanning. By implementing controlled periodic tapping actions with optimized frequency and amplitude, the system achieves high peak force tapping frequency while maintaining the ability to scan extended ranges through coordinated periodic motion and feedback control.
Data Source
AI summary
A scanning probe microscope based on high-speed instantaneous force control is used scan a sample, which includes steps of acquiring an acting force signal between a probe unit and a sample; calculating a real amplitude signal according to the acting force signal; acquiring a set amplitude signal; acquiring the first sinusoidal signal; obtaining a target acting force signal according to the real amplitude signal, the set amplitude signal and the first sinusoidal signal; and scanning the surface of the sample in a target sample scanning mode according to the target acting force signal, wherein the target sample scanning mode represents the operating mode of scanning the surface of the sample under the indication of the target acting force signal. The method solves the problems of low peak force tapping frequency and limited scanning range, and realizes high-speed instantaneous force tapping and mechanical property measurement while ensuring the scanning range.