Scanning Probe Microscope Laser Axis Adjustment

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Solution Overview

Problem

Scanning probe microscopes face challenges with diffused reflection of laser beams due to scratches or dust on the irradiation surface, which affects the accuracy of optical axis adjustment, leading to incorrect identification of the irradiation position and subsequent feedback control failures.

Innovation Solution

A scanning probe microscope system that includes a cantilever, a light source, a moving mechanism, and an imaging unit, where a control device identifies diffusely reflecting positions and adjusts the laser beam's irradiation position to avoid these areas, ensuring accurate optical axis adjustment by capturing images and moving the laser beam accordingly.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If the laser beam is emitted to the irradiation surface to identify the irradiation position, then the optical axis adjustment can be performed, but diffused reflection caused by scratches or dust on the irradiation surface leads to incorrect identification of the irradiation position

Engineering Contradiction:

Improveirradiation position identification accuracyVSAvoiddiffused reflection from scratches and dust

Core Design Contradiction:

Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

The imaging unit captures an image of the irradiation surface before emitting the laser beam to identify positions that cause diffused reflection. This preliminary identification allows the system to pre-determine a safe irradiation path that avoids defective areas, ensuring accurate optical axis adjustment without being affected by scratches or dust on the surface.

Inventive Principle:

Principle #10Preliminary action

2Productivity

If the optical axis adjustment is performed manually, then the adjustment can be customized, but the adjustment process takes too much time and is not efficient

Engineering Contradiction:

Improveoptical axis adjustment speedVSAvoidautomatic adjustment capability

Core Design Contradiction:

ProductivityVSEase of operation

Solution Approach 1:

The imaging unit provides visual feedback by capturing images of the irradiation surface and identifying positions that cause diffused reflection. The control device uses this feedback information to automatically calculate and adjust the laser beam's irradiation position, enabling the system to perform optical axis adjustment automatically without manual intervention while maintaining high accuracy.

Inventive Principle:

Principle #23Feedback

Solution Approach 2:

The system performs self-adjustment by automatically identifying diffused reflection positions and calculating the appropriate irradiation position on its own. The control device autonomously determines the optimal irradiation point that avoids defective areas, eliminating the need for manual operation and significantly improving adjustment efficiency.

Inventive Principle:

Principle #25Self-service

3Measurement precision

If the laser beam spot diameter is reduced to nanometer or micrometer unit for precise measurement, then the measurement precision is improved, but the laser beam becomes more susceptible to diffused reflection from dust and scratches

Engineering Contradiction:

Improvespot diameter precisionVSAvoidlaser beam reflection stability

Core Design Contradiction:

Measurement precisionVSReliability

Solution Approach 1:

Before emitting the high-precision laser beam with nanometer or micrometer spot diameter, the imaging unit preliminarily identifies positions on the irradiation surface that cause diffused reflection. This advance preparation allows the system to select an irradiation position that avoids defective areas, ensuring both the precision and reliability of the laser beam measurement are maintained.

Inventive Principle:

Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach prevents diffused reflection from adversely affecting optical axis adjustment, allowing for precise identification and adjustment of the laser beam's position, thereby improving the accuracy and efficiency of the scanning process.

Implementation Method 1

identify a position that diffusely reflects the laser beam, based on an image captured by the imaging unit

Methodology Applied

Scientific EffectDiffuse reflection: Reflection

Implementation Method 2

a light source configured to emit a laser beam toward the cantilever

Methodology Applied

Scientific EffectLaser beam emission: Laser

Data Source

PatentUS11162974B2Scanning probe microscope and optical axis adjustment method in scanning probe microscope

Publication Date: 2021.11.02 SHIMADZU CORP

AI summary

Diffused reflection of a laser beam is prevented from adversely affecting the processing of an optical axis adjustment of the laser beam in a scanning probe microscope. In a case where a position of a spot of a laser beam identified based on an image captured by an imaging unit is moved in a direction predicted when the laser beam is moved, a control device of the scanning probe microscope sets a position of the identified spot as an initial position. The control device identifies the position that diffusely reflects the laser beam based on the image captured by the imaging unit and moves the spot from the initial position to the tip of the cantilever by avoiding the position that diffusely reflects the laser beam.