SPM Nanotip Array Substrates for Fast Probe Replacement

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Solution Overview

Problem

Existing SPM configurations face challenges in tip deterioration during repeated scans and require complex and time-consuming probe exchanges for different types of measurements, limiting their applicability in large-scale industrial applications.

Innovation Solution

A method for producing a substrate with a plurality of nano-sized tips arranged in a regular array, using a mask and etching process to create pedestals with integrated tips, enabling efficient and rapid SPM measurements without frequent tip replacements.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a single tip is used in conventional SPM configurations, then the measurement can be performed, but the tip deteriorates after a number of scans requiring repeated replacements

Engineering Contradiction:

Improvetip durabilityVSAvoidtime for tip replacement

Core Design Contradiction:

ReliabilityVSLoss of time

Solution Approach 1:

The invention divides the tip function into multiple independent tips arranged in an array on a substrate. Instead of using a single tip that deteriorates, the system uses a array of multiple tips where worn tips can be replaced without replacing the entire probe assembly, thus improving reliability while reducing time loss.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The invention enables selective replacement of individual worn tips while retaining the substrate and remaining functional tips. This allows the system to discard only the deteriorated portion (single tip) while recovering and reusing the rest of the probe assembly, reducing overall time loss compared to replacing the entire probe.

Inventive Principle:

Principle #34Discarding and recovering

2Adaptability or versatility

If different types of probes are exchanged for different types of SPM measurements, then the measurement requirements can be met, but the operation is complex and time-consuming

Engineering Contradiction:

Improvemeasurement type flexibilityVSAvoidprobe exchange complexity

Core Design Contradiction:

Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The invention creates a universal probe substrate that can accommodate multiple types of tips (e.g., AFM tips, SSRM tips) in the same array structure. This allows a single substrate to serve multiple measurement functions by simply exchanging the tip array, reducing device complexity while maintaining adaptability for different measurement types.

Inventive Principle:

Principle #6Universality (Multi-functionality)

3Productivity

If conventional cantilever-based tip fabrication methods are used, then tips can be produced, but a large number of tips are required for industrial-scale applications which these methods cannot produce

Engineering Contradiction:

Improvetip production volumeVSAvoidmanufacturability of large tip arrays

Core Design Contradiction:

ProductivityVSEase of manufacture

Solution Approach 1:

The invention merges multiple tip fabrication processes into a single integrated workflow where a substrate is patterned with an array of cavities, filled with tip material, and then the entire array is transferred to a carrier substrate. This combining of steps enables mass production of large tip arrays suitable for industrial-scale applications while maintaining ease of manufacture through standardized semiconductor fabrication processes.

Inventive Principle:

Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Facilitates the production of substrates with thousands or millions of SPM tips, allowing consecutive measurements in quick succession, suitable for industrial-scale applications like semiconductor fabrication, with improved efficiency and reduced operational complexity.

Implementation Method 1

the substrate is subjected to an etching process relative to the mask portions

Methodology Applied

Scientific EffectSelective etching:

Data Source

PatentUS12584943B2Method for producing a substrate comprising multiple tips for scanning probe microscopy

Publication Date: 2026.03.24 INTERUNIVERSITAIR MICRO ELECTRONICS CENT (IMEC VZW)

AI summary

One embodiment of the present disclosure is related to a method for producing a substrate comprising a plurality of tips suitable to be used in scanning probe microscopy (SPM), wherein as a first step, a substrate is produced or provided comprising a plurality of nano-sized tips, preferably arranged in a regular array and spaced apart by nano-sized interspacings. A mask is applied to this substrate, comprising multiple mask portions, wherein each mask portion covers at least one tip, whereafter the substrate is subjected to an etching process relative to the mask portions. After the removal of the mask portions, the method results in the creation of a substrate comprising multiple pedestals having each at least one nanotip on the upper surface thereof and spaced apart at a distance suitable for performing an SPM measurement of a given type.