Scanning Probe Microscopy Displacement Correction
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Solution Overview
Problem
Scanning probe microscopy often causes displacement of the measurement object, leading to defocusing issues during optical examination, as the observation region of the optical measurement system must spatially overlap with the optically examined section, which is not feasible due to significant displacement widths in distance spectroscopy, typically exceeding 100 μm.
Innovation Solution
A method and apparatus that correct the displacement of the measurement object relative to the optical measurement system's observation region during scanning probe microscopy, allowing for simultaneous or temporally associated optical examination by adjusting the observation region or displacing the optical measurement system, using data signals from scanning probe microscopy to reposition the measurement object within the focusing plane.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If scanning probe microscopy is used to examine the measurement object, then detailed topography and material contrast information can be obtained, but the measurement object experiences displacement that causes defocusing in optical examination
Solution Approach 1:
The system uses feedback control by detecting the position of the measurement object during scanning probe microscopy and automatically adjusting the optical measurement system to track and maintain the object within the observation region, ensuring continuous focused optical observation despite object displacement
Solution Approach 2:
A position detection device serves as an intermediary between the scanning probe microscopy system and the optical measurement system, detecting object displacement and providing correction signals to the optical system to maintain proper focusing
2Measurement precision
If the measurement object is displaced during distance spectroscopy, then force measurements can be performed, but the object moves out of the observation region of the optical measurement system
Solution Approach 1:
The optical measurement system is made dynamic by enabling real-time adjustment of the observation region to follow the displaced measurement object, allowing continuous optical observation during force measurements without requiring the object to remain stationary
Solution Approach 2:
The system integrates multiple functions by combining scanning probe microscopy, optical measurement, and position detection capabilities into a unified platform that can perform both force measurements and optical observation simultaneously through coordinated control
3Adaptability or versatility
If the support or measurement probe is moved to vary distance, then distance spectroscopy measurements are enabled, but defocusing occurs regardless of which component moves
Solution Approach 1:
The system employs feedback control where the position detection device monitors object displacement caused by support or probe movement and the optical measurement system automatically adjusts to maintain the object within the observation region, ensuring continuous focus during distance spectroscopy
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables combined examination of the measurement object using both scanning probe microscopy and optical methods without defocusing, ensuring accurate and continuous optical observation by readjusting the observation region or optical system to maintain the measurement object within the focus.
Implementation Method 1
the measurement object is examined by means of scanning probe microscopy using a measurement probe of a scanning probe measurement device
Implementation Method 2
Optical methods such as fluorescence microscopy, for example, are able to supply information about the composition of the sample examined
Data Source
AI summary
The invention relates to a method for examining a measurement object (2, 12), in which the measurement object (2, 12) is examined by means of scanning probe microscopy using a measurement probe (10) of a scanning probe measurement device, and in which at least one subsection (1) of the measurement object (2, 12) is optically examined by an optical measurement system in an observation region associated with the optical measurement system, wherein a displacement of the at least one subsection (1) of the measurement object (2, 12) out of the observation region which is brought about by the examination by means of scanning probe microscopy is corrected in such a way that the at least one displaced subsection (1) of the measurement object (2, 12) is arranged back in the observation region by means of a readjustment device which processes data signals that characterize the displacement.