Spring-Loaded Pin Fastener for Plasma Chamber Void Control
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Solution Overview
Problem
In plasma processing systems, parasitic plasma forms in voids of hex socket screws, leading to contamination and nonuniform processing, and existing solutions like filling the sockets with plugs complicate installation and removal.
Innovation Solution
A fastener assembly featuring a bolt with a tool-engaging socket and a spring-loaded pin that fills the void in the hex socket, preventing parasitic plasma formation and allowing easy tool access for installation and removal.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If hex socket screws are used in plasma processing systems, then fastening is achieved, but parasitic plasma forms in the voids of hex sockets causing contamination and nonuniform processing
Solution Approach 1:
The harmful void space within the hex socket is extracted and removed by filling it with a non-plasma-forming material such as a plug or epoxy, eliminating the source of parasitic plasma while preserving the external hex socket structure for fastening functionality
Solution Approach 2:
An intermediary material (plug or epoxy) is introduced into the hex socket void to act as a barrier between the plasma environment and the hollow space, preventing plasma formation in the void while allowing the hex socket to maintain its fastening function
2Manufacturing precision
If hex socket voids are filled with plugs to prevent parasitic plasma, then plasma uniformity improves, but installation and removal of screws becomes more difficult and time consuming
Solution Approach 1:
The fastening system is segmented into two functional parts: the external hex socket structure for tool engagement and fastening, and the internal plug material for plasma prevention, allowing each part to optimize its specific function without compromising the other
Solution Approach 2:
Different regions of the hex socket serve different functions: the outer hexagonal region maintains its original geometry for tool engagement, while the inner void region is filled with plasma-preventive material, creating local quality differentiation that resolves the contradiction
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Prevents parasitic plasma formation during plasma processing, enhancing processing uniformity and simplifying the installation and removal of fasteners in plasma processing systems.
Implementation Method 1
a spring-loaded pin that fills the void in the hex socket
Data Source
AI summary
A fastener assembly for parts of a plasma chamber. The fastener assembly includes a bolt with a tool engaging socket and a spring-loaded pin which fits in a through hole of the bolt. When installed, the spring-loaded pin substantially fills the space in the socket and thus prevents parasitic plasma from forming in spaces between opposed surfaces of the pin and bolt. When a tool such as a hex key is inserted into the socket, the spring-loaded pin retracts and the tool rotates the bolt to attach an upper part to a lower part by engaging threads of the bolt with a threaded hole in the lower part.