Modular Housing Cover for Sputtering Magnet Maintenance
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Solution Overview
Problem
Existing magnet systems for sputtering devices are complex, making maintenance difficult and reducing reliability, due to the integration of components for power supply and signal transmission.
Innovation Solution
A housing cover assembly that integrates a gear stage, generator, rotary coupling, and optional communication interface, allowing these components to be exchanged as a whole, simplifying maintenance and improving reliability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If components for power supply and signal transmission are integrated into the magnet system, then the magnet system can achieve adjustable magnetic field and proper functionality, but the design complexity increases and maintenance becomes difficult
Solution Approach 1:
The magnet system is divided into modular components: the magnet system proper and the housing cover assembly. The housing cover contains all auxiliary components (power supply connections, signal transmission interfaces, generator, gear stage) as a separate replaceable module. This segmentation allows the magnet system to maintain functionality while reducing overall design complexity and facilitating easier maintenance.
2Adaptability or versatility
If multiple components for power supply and communication are integrated into the magnet system, then the system achieves complete functionality, but the difficulty of maintenance increases
Solution Approach 1:
The housing cover assembly serves as a self-contained module that can be removed and replaced as a single unit. All components related to power supply and signal transmission are contained within this removable housing cover, allowing maintenance personnel to service or replace these components without disassembling the entire magnet system.
Solution Approach 2:
The auxiliary components (power supply connections, communication interfaces, generator, gear stage) are extracted from the main magnet system and placed into a separate housing cover. This extraction allows the magnet system to maintain its core functionality while enabling independent maintenance of the auxiliary components.
3Ease of operation
If the magnet system includes integrated power supply and communication components, then the system achieves proper operational capability, but reliability is reduced due to increased complexity
Solution Approach 1:
By segmenting the system into the magnet system and the removable housing cover assembly, the patent reduces the number of potential failure points in the main magnet system. The housing cover can be independently serviced or replaced, preventing failures in auxiliary components from affecting the core magnet system functionality.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The integrated housing cover assembly simplifies maintenance by allowing the entire unit to be replaced without affecting other components, enhancing the reliability and operational stability of the magnet system.
Implementation Method 1
a generator (308) arranged in the housing cover (406d)
Implementation Method 2
The magnetic field may be generated by a magnet system and penetrate the cathode (then also referred to as magnetron cathode) so that a toroidal plasma channel, a so-called racetrack, may be formed on the surface of the target material (target surface) in which plasma may form.
Implementation Method 3
a plasma-forming gas may be ionized by means of a cathode, and a material to be deposited (target material) may be sputtered by means of the plasma formed in the process
Implementation Method 4
By means of sputtering (i.e., by means of a sputtering process), for example, one layer or plurality of layers may be deposited on a substrate. The atomized target material may then be brought to a substrate on which it may be deposited and form a layer.
Data Source
AI summary
Disclosed herein are systems, methods, devices for a magnet system that includes a housing with a housing interior. The magnet system also includes a magnet holder disposed in the housing interior and supported by the housing, preferably stationary with respect thereto. The magnet system also includes a housing cover forming a fluid-tight chamber when mated with the housing, wherein the housing cover includes a gear stage, a generator, and a rotary coupling that couples the gear stage to the generator.