Sputtering Target Switching for Continuous Vacuum Film Deposition
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Film forming apparatuses with multiple targets face inefficiencies in maintaining high operating rates due to target lifespan management challenges, leading to reduced maintenance cycles and operational interruptions.
Innovation Solution
A method where multiple targets made of the same material are used in a film forming apparatus, with automatic switching based on predetermined lifespan thresholds, allowing continuous film formation without opening the vacuum chamber, and adjusting target-related control settings for seamless substitution.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a single target is used in the film forming apparatus, then the device complexity is reduced, but the productivity decreases due to frequent maintenance interruptions
Solution Approach 1:
The film forming apparatus is segmented into multiple independent target units (first target and second target), each capable of performing the film formation process. This segmentation allows one target to be used while another undergoes maintenance or replacement, thereby maintaining high productivity without increasing overall system complexity.
Solution Approach 2:
The system performs preliminary actions by pre-positioning multiple targets and pre-managing their lifespan data. When the first target approaches its lifespan threshold, the system is already prepared to switch to the second target without interruption, eliminating downtime and maintaining continuous operation.
2Loss of time
If target switching is performed manually, then the device complexity is reduced, but the loss of time increases due to maintenance interruptions
Solution Approach 1:
The system implements feedback mechanisms by continuously monitoring the lifespan of each target and automatically determining when to switch between targets. The control unit receives lifespan information and autonomously performs the switching operation, eliminating manual intervention and preventing downtime associated with manual target replacement.
Solution Approach 2:
The film forming apparatus performs self-service through automatic target switching based on monitored lifespan data. The system independently manages its own target replacement process without requiring external human intervention, thereby eliminating the time loss associated with manual operations and maintaining continuous productivity.
3Ease of operation
If the vacuum chamber is opened for target replacement, then the ease of operation is improved, but the loss of time increases due to vacuum chamber cycling
Solution Approach 1:
The system maintains continuity of useful action by enabling target switching without opening the vacuum chamber. The automatic switching mechanism allows the film formation process to continue uninterrupted, preserving the vacuum state and eliminating the time-consuming cycle of vacuum chamber opening and closing that would otherwise be required for target replacement.
4Productivity
If multiple targets are equipped in the film forming apparatus, then the productivity is improved, but the device complexity increases due to target management
Solution Approach 1:
The control unit performs multiple functions by managing lifespan data for multiple targets, automatically determining switching timing, and executing the switching operation. This multi-functional approach consolidates the complexity of managing multiple targets into a single integrated system, thereby improving productivity without proportionally increasing overall device complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach extends the maintenance cycle and improves the operating rate of the film forming apparatus by enabling continuous operation while maintaining the vacuum state, reducing downtime and increasing productivity.
Implementation Method 1
a film forming apparatus having a plurality of metal targets and configured to form a metal oxide film on an object to be processed
Data Source
AI summary
There is provided a film forming method performed in a film forming apparatus having cathode units capable of installing a plurality of targets. The method comprises performing a film formation process using a first target between the first target and a second target that are disposed at the cathode units and are made of the same material, based on a recipe of the first target, receiving from a user, after a value for managing a lifespan of the first target has reached a predetermined threshold, selection of the second target to be used for the film forming process, and performing the film forming process using the selected second target based on a recipe in which setting of target-related control items of the recipe of the first target is converted for the selected second target.