Stacked Capacitor Structure for High-Voltage Snubber Miniaturization
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
High-power power conversion circuits face challenges in reducing the area of snubber capacitors required for high withstand voltages, making it difficult to miniaturize power modules due to the large chip area needed for sufficient capacitance and voltage handling.
Innovation Solution
A semiconductor device with multiple capacitors connected in parallel, each formed by a lower electrode, dielectric layers, and upper electrodes, allowing for a compact design with high withstand voltage and capacitance, reducing the overall chip area by approximately 42% compared to traditional designs.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a thick dielectric layer is formed in a trench shape to achieve high withstand voltage (1000 V), then the capacitance requirement is met, but the chip area becomes excessively large (9.32 mm×9.32 mm for 1 nF)
Solution Approach 1:
The patent transitions from a planar trench capacitor design to a three-dimensional stacked capacitor structure. Multiple capacitor elements are arranged vertically in layers, with first and second capacitive elements stacked on top of each other. This vertical stacking approach converts the problem from a two-dimensional area constraint to a three-dimensional volume utilization, achieving high capacitance and withstanding voltage without requiring large chip area.
Solution Approach 2:
The patent divides the single large capacitor into multiple smaller capacitor elements (first capacitive element and second capacitive element) that are segmented and arranged in different layers. Each capacitor element has its own electrodes and dielectric layers, and they are connected through conductive structures. This segmentation allows the total capacitance to be achieved through parallel combination while reducing the area requirement for each individual element.
2Quantity of substance
If a planar snubber capacitor is used to achieve sufficient capacitance (1 nF or more) for surge voltage suppression, then the capacitance requirement is met, but the chip area becomes as large as the power device itself
Solution Approach 1:
The patent employs vertical stacking of multiple capacitor layers to achieve the required capacitance value of 1 nF or more without increasing chip area. The first and second capacitive elements are arranged in different vertical layers, utilizing the third dimension (height) to increase effective capacitance while maintaining a compact footprint that is significantly smaller than traditional planar designs.
Solution Approach 2:
The patent combines multiple capacitor elements (first capacitive element and second capacitive element) into a single integrated stacked structure. The conductive layers and dielectric layers are merged across multiple levels, with shared electrodes and interconnections, creating a compact multi-layer capacitor assembly that achieves high capacitance in a small area.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables the realization of high-withstand voltage capacitive elements with a small chip area, facilitating the miniaturization of power conversion circuits and integration into power modules while maintaining stable resistance characteristics for surge voltage suppression.
Implementation Method 1
a first capacitor between the lower electrode and the first upper electrode, a second capacitor between the first upper electrode and the second upper electrode, and a third capacitor between the second upper electrode and the third upper electrode are connected in parallel with each other
Implementation Method 2
a first dielectric layer provided on the lower electrode; a first upper electrode provided on the first dielectric layer; a second dielectric layer provided on the first upper electrode; a second upper electrode provided on the second dielectric layer
Data Source
AI summary
A semiconductor device includes: a lower electrode; a first dielectric layer provided on the lower electrode; a first upper electrode provided on the first dielectric layer; a second dielectric layer provided on the first upper electrode; a second upper electrode provided on the second dielectric layer and electrically connected to the lower electrode; a third dielectric layer provided on the second upper electrode; and a third upper electrode provided on the third dielectric layer and electrically connected to the first upper electrode, wherein a first capacitor between the lower electrode and the first upper electrode, a second capacitor between the first upper electrode and the second upper electrode, and a third capacitor between the second upper electrode and the third upper electrode are connected in parallel with each other.


