Stacked Chip Wiring Lines With Variable Bonding Portions

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Solution Overview

Problem

Existing semiconductor devices with stacked chips lack efficient utilization of bonding portions for optimal wiring performance, leading to suboptimal reliability and characteristics in inter-chip connections.

Innovation Solution

The implementation of multiple types of wiring lines with varying numbers of contacts and bonding portions in the overlap area between stacked chips, allowing for optimized ratios and configurations to enhance reliability and reduce parasitic capacitance, thereby improving inter-chip wiring efficiency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If multiple types of wiring lines with varying numbers of bonding portions are implemented, then reliability of inter-chip connections is improved, but device complexity increases

Engineering Contradiction:
Improvereliability of inter-chip connectionsVSAvoidwiring line configuration complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The wiring lines are segmented into multiple types based on the number of bonding portions they contain. First wiring lines have a first number of bonding portions while second wiring lines have a second number of bonding portions, allowing the inter-chip connection system to be divided into different reliability categories for different signal requirements

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different wiring lines are assigned different numbers of bonding portions based on their specific functional requirements. Critical signals use wiring lines with more bonding portions for higher reliability, while less critical signals use wiring lines with fewer bonding portions, optimizing the overall system without uniform complexity

Inventive Principle:
Principle #3Local quality

2Reliability

If the number of bonding portions in wiring lines is increased, then reliability is improved, but parasitic capacitance increases

Engineering Contradiction:
Improveconnection reliabilityVSAvoidparasitic capacitance
Core Design Contradiction:
ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The patent changes the parameter of bonding portion count to create different wiring line types. By varying this discrete parameter, the system achieves different reliability levels while managing parasitic capacitance through selective application to different signal types

Inventive Principle:
Principle #35Parameter changes

3Productivity

If wiring lines with optimized ratios of contacts to bonding portions are used, then inter-chip wiring efficiency is improved, but manufacturing precision requirements increase

Engineering Contradiction:
Improveinter-chip wiring efficiencyVSAvoidbonding portion alignment precision
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

The conductive patterns are pre-configured with specific numbers of bonding portions during the chip fabrication process. This preliminary action allows for optimized wiring line types to be built-in before stacking, reducing the precision requirements during the bonding process itself

Inventive Principle:
Principle #10Preliminary action

Data Source

PatentUS11742373B2Semiconductor device and method of manufacturing semiconductor device
Publication Date: 2023.08.29 CANON KK
  • US11742373B2 patent drawing
  • US11742373B2 patent drawing
  • US11742373B2 patent drawing

AI summary

A semiconductor device in which a first chip and a second chip are stacked including a first wiring line and a second wiring line by which the first chip and the second chip are electrically connected. The first wiring line and the second wiring line each include a bonding portion for bonding one of a plurality of conductive patterns placed in the first chip and one of a plurality of conductive patterns placed in the second chip. The number of bonding portions included in the first wiring line is larger than the number of bonding portions included in the second wiring line.