Stacked Semiconductor Die Package with Cavity Substrate

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Solution Overview

Problem

The challenge in packaging semiconductor devices is to reduce the size of die packages while increasing functional capacity without increasing the surface area, which is complicated by the stacking of multiple dies that leads to higher failure probabilities and costs due to increased vertical profile and heat trapping.

Innovation Solution

The solution involves creating a stacked semiconductor die package with a substrate having cavities where the first die is mounted within the cavity and the second die is positioned over it, allowing for a thinner assembly, efficient heat dissipation, and reduced manufacturing costs by using air gaps between the dies.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If multiple semiconductor dies are stacked vertically to increase functional capacity without increasing surface area, then the processing power per package is improved, but the vertical profile increases requiring substantial die thinning and the probability of device failure increases

Engineering Contradiction:
Improvefunctional capacityVSAvoiddevice failure probability
Core Design Contradiction:
Quantity of substanceVSReliability

Solution Approach 1:

The patent transitions from planar die arrangement to three-dimensional stacking by positioning dies at different vertical levels within a package cavity. Multiple dies are arranged in a stacked configuration along the vertical dimension, allowing increased functional capacity without increasing the package footprint. This dimensional change enables higher density while maintaining reliability through proper spatial separation and thermal management.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Area of stationary object

If multiple semiconductor dies are stacked vertically to reduce package footprint, then the surface area is reduced, but the vertical profile increases requiring substantial die thinning

Engineering Contradiction:
Improvepackage footprintVSAvoidvertical profile
Core Design Contradiction:
Area of stationary objectVSLength of stationary object

Solution Approach 1:

The patent implements a nested arrangement where multiple semiconductor dies are positioned within a package cavity in a stacked configuration. Each die is placed within the vertical space of the package, with dies nested relative to one another along the vertical axis. This nesting approach maximizes the use of three-dimensional space, reducing the package footprint while managing the vertical profile through optimized die placement and cavity design.

Inventive Principle:
Principle #7Nested doll (Nesting)

3Quantity of substance

If multiple semiconductor dies are stacked vertically to increase processing power, then the functional capacity is improved, but heat trapping increases leading to higher operating temperatures

Engineering Contradiction:
Improveprocessing powerVSAvoidoperating temperature
Core Design Contradiction:
Quantity of substanceVSTemperature

Solution Approach 1:

The patent extracts heat from the stacked die configuration by implementing thermal management structures that conduct heat away from the dies. Thermal vias, heat sinks, or heat spreaders are integrated into the package to extract heat generated by the stacked dies and dissipate it to the package exterior. This extraction approach enables high processing power while maintaining acceptable operating temperatures by preventing heat accumulation in the stacked die structure.

Inventive Principle:
Principle #2Taking out (Extraction)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach results in higher yields, more efficient manufacturing, decreased costs, and lower operating temperatures due to improved heat management and reduced thermal effects on the dies.

Implementation Method 1

efficient heat dissipation

Methodology Applied
Scientific EffectHeat dissipation: Convection

Implementation Method 2

improved heat management and reduced thermal effects on the dies

Methodology Applied
Scientific EffectThermal management: Thermal Radiation

Data Source

PatentUS10748872B2Integrated semiconductor assemblies and methods of manufacturing the same
Publication Date: 2020.08.18 MICRON TECHNOLOGY INC
  • US10748872B2 patent drawing
  • US10748872B2 patent drawing
  • US10748872B2 patent drawing

AI summary

Integrated semiconductor assemblies and associated methods of manufacturing are disclosed herein. In one embodiment, a semiconductor device assembly comprises a base substrate having a cavity and a perimeter region at least partially surrounding the cavity. The cavity is defined by sidewalls extending at least partially through the substrate. The assembly further comprises a first die attached to the base substrate at the cavity, and a second die over at least a portion of the first die and attached to the base substrate at the perimeter region. In some embodiments, the first and second dies can be electrically coupled to each other via circuitry of the substrate.