3D Die Stack Side-Wall Interconnects for TSV-Free Footprint Reduction

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Solution Overview

Problem

Conventional 3D chip stacks rely on through-silicon vias (TSVs) for interconnections, leading to larger chip sizes and inefficient use of space due to keep-out zones and limitations in placing IP cores on adjacent dies.

Innovation Solution

The implementation of side wall interconnections between die layers in a semiconductor package, which includes exposing side wall pads on the die layers for bonding and using additional layers like RDL to provide vertical interconnections, reducing the need for TSVs and optimizing chip footprint.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If through-silicon vias (TSVs) are used for interconnections between die layers, then vertical connectivity is achieved, but chip footprint increases due to keep-out zones

Engineering Contradiction:
Improvevertical connectivityVSAvoidchip footprint
Core Design Contradiction:
ReliabilityVSArea of stationary object

Solution Approach 1:

The patent transitions from vertical TSV interconnections to lateral side-wall interconnections. By moving the interconnection path from the vertical dimension (through-silicon) to the lateral dimension (side-wall), the design eliminates the need for large keep-out zones around vertical vias, thereby reducing chip footprint while maintaining connectivity.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

Instead of creating holes through the silicon substrate from top to bottom (TSV approach), the patent inverts the approach by forming interconnections along the side-walls of the dies. This inversion of the interconnection geometry allows pads to be placed at the periphery rather than requiring central via locations, reducing the keep-out zone impact.

Inventive Principle:
Principle #13The other way round (Inversion)

2Productivity

If TSVs are used for interconnections, then die stacking is enabled, but IP core placement flexibility is reduced

Engineering Contradiction:
Improvedie stacking capabilityVSAvoidIP core placement flexibility
Core Design Contradiction:
ProductivityVSAdaptability or versatility

Solution Approach 1:

By shifting interconnections to the side-walls, the patent enables IP cores to be placed more freely on the die surface without needing to align with vertical via locations. This dimensional shift from vertical to lateral interconnection provides greater placement flexibility for IP cores while maintaining die stacking capability.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Area of stationary object

If side wall interconnections are used, then chip footprint is reduced, but manufacturing complexity increases

Engineering Contradiction:
Improvechip footprintVSAvoidmanufacturing process complexity
Core Design Contradiction:
Area of stationary objectVSDevice complexity

Solution Approach 1:

The patent performs preliminary actions by forming the side-wall interconnection structures during the die fabrication process itself, before die stacking. By pre-forming the lateral interconnection paths and pads on each die, the manufacturing complexity is managed in controlled stages rather than requiring complex post-stack modifications.

Inventive Principle:
Principle #10Preliminary action

Data Source

PatentEP4312266A1Semiconductor package with side wall interconnection
Publication Date: 2024.01.31 AVAGO TECHNOLOGIES INTERNATIONAL SALES PTE LTD
  • EP4312266A1 patent drawingFigure 1
  • EP4312266A1 patent drawingFigure 2
  • EP4312266A1 patent drawingFigure 3

AI summary

Tools and techniques for a semiconductor package providing side wall interconnections are provided. An apparatus includes two or more die layers that are bonded together, the first 3D stacked die package comprising a top surface, bottom surface, and one or more side walls. A first side wall of the one or more side walls includes two or more side wall pads, wherein each side wall pad of the two or more side wall pads is coupled to an interconnect of a respective die layer of the two or more die layers.